Diffusion Morning Report 04/10/06

Ted Berg tberg at snf.stanford.edu
Mon Apr 10 06:32:10 PDT 2006

Good Morning All,
    Looking Ok this morning. Nitride not pumping down-looking into it. 
Sample dropped in SEM hitachi-will retreive. The temp
cal on POCl3 should be done today. Everythingelse looks OK for now.

	Date: 	4/10/06 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	
Tylan 1 	Up 	  	
Tylan 2 	Up 	  	
Tylan 3 	Up 	  	
Tylan 4 	Up 	  	
Tylan 5-BBr3 	Up 	  	
Tylan 6-POCl3 	Down 	temp cal 	
Tylan 7-TEOS2 	Up 	  	16.69/30 	
Tylan 8-SiGe 	Up 	  	27.5/30 	
Tylan 9-Poly 	Up 	  	19.61/30 	
Tylan 10-Nitride 	Up 	  	18.54/30 	
Tylan 11-BPSG-LTO 	Up 	  	21.05/30 	
Tylan 12-FGA 	Up 	  	  	
Thermco 1 	Up 	  	
Thermco 2 	Up 	  	
Thermco Poly 	Up 	  	
Thermco Nitride 	Down 	Testing 	

Epi 	up 	  	

Burn Box 	Up 	  	
ZYGO 	up 	  	   	

GAAS 22 	UP 	
GAAS 23 	up 	  	

SiH4 for furnaces 	
	A on line 645 psi 	 changeover working well 

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