DIFFUSION MORNING REPORT

Raymond Seymour seymour at snf.stanford.edu
Wed Apr 12 08:03:12 PDT 2006


Good Morning All,

Ted is out today. The rail replacement on Tylan 1 was completed yesterday
morning, and it went well. The rest of the tubes in bank one will be done
one at a time as the rails are swapped out. Epi has an interlock problem
this morning. All else looking good.

 


Diffusion

 

 

 

 

 


 

Date:

4/1206

THICKNESS-Change at

 

 


Tube Name/Number

Status

Comments

 

 

 


Tylan 1

Up

 

 

 

 


Tylan 2

Up

 

 

 

 


Tylan 3

Up

 

 

 

 


Tylan 4

Up

 

 

 

 


Tylan 5-BBr3

Up

 

 

 

 


Tylan 6-POCl3

Up

 

 

 

 


Tylan 7-TEOS2

Up

 

16.69/30

 

 


Tylan 8-SiGe

Up

 

27.5/30

 

 


Tylan 9-Poly

Up

 

19.85/30

 

 


Tylan 10-Nitride

Up

 

19.57/30

 

 


Tylan 11-BPSG-LTO

Up

 

22.90/30

 

 


Tylan 12-FGA

Up

 

 

 

 


 

 

 

 

 

 


Thermco 1

Up

 

 

 

 


Thermco 2

Up

 

 

 

 


Thermco Poly

Up

 

 

 

 


Thermco Nitride

Down

Testing

 

 

 


 

 

 

 

 

 


Epi

DOWN

 

 

 

 


 

 

 

 

 

 


Burn Box

Up

 

 

 

 


ZYGO

up

 

  

 

 


 

 

 

 

 

 


GAAS 22

UP

 

 

 

 


GAAS 23

up

 

 

 

 


 

 

 

 

 

 


SiH4 for furnaces

 

A on line 670psi

 changeover working well 

 

 

 

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