Diffusion Morning Report 04/13/06

Ted Berg tberg at snf.stanford.edu
Thu Apr 13 07:58:17 PDT 2006


Good Morning All,
    Looking good this morning. Had several furnace problems we are 
addressing. Elipsometer printer was changed, so it is functional. Waiting
for Ulis blessing not curse. Tylan 1 temp cal in progress.  Everything 
else looks OK for now .

Diffusion 	  	  	  	  	 
  	Date: 	4/13/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	Up 	  	  	  	 
Tylan 2 	Up 	  	  	  	 
Tylan 3 	Up 	  	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	Up 	  	16.69/30 	  	 
Tylan 8-SiGe 	Up 	  	27.5/30 	  	 
Tylan 9-Poly 	Up 	  	21.02/30 	  	 
Tylan 10-Nitride 	Up 	  	19.61/30 	  	 
Tylan 11-BPSG-LTO 	Up 	  	23.55/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	  	  	  	 
Thermco Nitride 	Down 	Testing 	  	  	 
  	  	  	  	  	 
Epi 	up 	  	  	  	 
  	  	  	  	  	 
Burn Box 	Up 	  	  	  	 
ZYGO 	up 	  	   	  	 
  	  	  	  	  	 
GAAS 22 	UP 	  	  	  	 
GAAS 23 	up 	  	  	  	 
  	  	  	  	  	 
SiH4 for furnaces 	  	A on line 645 psi 	 changeover working well  	  	 


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