Diffusion Morning Report 04/17/06

Ted Berg tberg at snf.stanford.edu
Mon Apr 17 06:42:44 PDT 2006


Good Morning all.
    Happy Tax Day. Looking good this morning. Tylan 1 is down waiting 
for SCR, Tylan3 is down for rail replacement.  Poly is over 30microns
thanks to a couple of long runs. No break until Thursday when it will go 
down for pull and clean.  Everything else looks OK for now.

Diffusion 	  	  	  	  	 
  	Date: 	4/17/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	down 	bad scr 	  	  	 
Tylan 2 	Up 	  	  	  	 
Tylan 3 	down 	rail change 	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	Up 	  	16.69/30 	  	 
Tylan 8-SiGe 	Up 	  	27.5/30 	  	 
Tylan 9-Poly 	Up 	  	30.29/30 	  	 
Tylan 10-Nitride 	Up 	  	19.61/30 	  	 
Tylan 11-BPSG-LTO 	Up 	  	24.55/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	  	  	  	 
Thermco Nitride 	Down 	Testing 	  	  	 
  	  	  	  	  	 
Epi 	up 	  	  	  	 
  	  	  	  	  	 
Burn Box 	Up 	  	  	  	 
ZYGO 	up 	  	   	  	 
  	  	  	  	  	 
GAAS 22 	UP 	  	  	  	 
GAAS 23 	up 	  	  	  	 
  	  	  	  	  	 
SiH4 for furnaces 	  	A on line 600 psi 	 changeover working well  	  	 


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20060417/02f8c85a/attachment.html>


More information about the diffusion mailing list