Diffusion Morning Report 04/19/06

Ted Berg tberg at snf.stanford.edu
Wed Apr 19 07:00:09 PDT 2006


Good Morning All,
    Well let's just say we have had better days. Tylan 1 is down for 
boatloader problem, Tylan 3 is yellow for bad uniformity, Epi has a
broken wafer. Tylan nitride has a Led out?  Everything else is OK for now.

Diffusion 	  	  	  	  	 
  	Date: 	4/19/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	down 	Uniformity is great. Boat bad 	  	  	 
Tylan 2 	Up 	  	  	  	 
Tylan 3 	yellow 	poor uniformity 	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	Up 	  	18/30 	  	 
Tylan 8-SiGe 	Up 	  	27.5/30 	  	 
Tylan 9-Poly 	Up 	  	31.41/30 	  	 
Tylan 10-Nitride 	Up 	  	22/30 	  	 
Tylan 11-BPSG-LTO 	Up 	  	28.53/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	  	  	  	 
Thermco Nitride 	Down 	Testing 	  	  	 
  	  	  	  	  	 
Epi 	down 	broken wafer 	  	  	 
  	  	  	  	  	 
Burn Box 	Up 	  	  	  	 
ZYGO 	up 	  	   	  	 
  	  	  	  	  	 
GAAS 22 	UP 	  	  	  	 
GAAS 23 	up 	  	  	  	 
  	  	  	  	  	 
SiH4 for furnaces 	  	A on line 600 psi 	 changeover working well  	  	 


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