Diffusion Morning Report 04/20/06

Ted Berg tberg at snf.stanford.edu
Thu Apr 20 06:34:46 PDT 2006


Good Morning All,
    Looking good this morning.  Tylan Poly down for pull and clean,  
Tylan 3 needs another test for uniformity.   Everything else looks OK 
for now.

Diffusion 	  	  	  	  	 
  	Date: 	4/20/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	Up 	  	  	  	 
Tylan 2 	Up 	  	  	  	 
Tylan 3 	yellow 	poor uniformity 	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	Up 	  	18/30 	  	 
Tylan 8-SiGe 	Up 	  	28.46/30 	  	 
Tylan 9-Poly 	Down 	pull and clean 	0/30 	  	 
Tylan 10-Nitride 	Up 	  	22/30 	  	 
Tylan11-BPSG-LTO 	Up 	  	29.6/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	  	  	  	 
Thermco Nitride 	Down 	Testing 	  	  	 
  	  	  	  	  	 
Epi 	yellow 	 high leak rate 	  	  	 
  	  	  	  	  	 
Burn Box 	Up 	  	  	  	 
ZYGO 	up 	  	   	  	 
  	  	  	  	  	 
GAAS 22 	UP 	  	  	  	 
GAAS 23 	up 	  	  	  	 
  	  	  	  	  	 
SiH4 for furnaces 	  	A on line 600 psi 	 changeover working well  	  	 

	
	
	
	
	


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