Diffusion Morning Report 04/21/06

Ted Berg tberg at snf.stanford.edu
Fri Apr 21 06:45:22 PDT 2006


Good Morning All,
    Looking good this morning. Poly is back up after Pull and clean, 
Thanks Mike and Maurice. Tylan3 is back up after door adjustment and
another test, thanks Mike and Nancy. Burn box cleaned this morning.  
Hitachi called for quote on PMs. New Epi is moving right along.
Everything else is OK for now. LTO going down on Monday for scheduled 
pull and clean.

Diffusion 	  	  	  	  	 
  	Date: 	4/21/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	Up 	  	  	  	 
Tylan 2 	Up 	  	  	  	 
Tylan 3 	Up 	  	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	Up 	  	18/30 	  	 
Tylan 8-SiGe 	Up 	  	28.46/30 	  	 
Tylan 9-Poly 	Up 	pull and clean completed 	0/30 	  	 
Tylan 10-Nitride 	Up 	  	22.7/30 	  	 
Tylan 11-BPSG-LTO 	Up 	  	29.6/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	  	  	  	 
Thermco Nitride 	Down 	Testing 	  	  	 
  	  	  	  	  	 
Epi 	yellow 	 high leak rate 	  	  	 
  	  	  	  	  	 
Burn Box 	Up 	Cleaned this morning 	  	  	 
ZYGO 	up 	  	   	  	 
  	  	  	  	  	 
GAAS 22 	UP 	  	  	  	 
GAAS 23 	up 	  	  	  	 
  	  	  	  	  	 
SiH4 for furnaces 	  	A on line 600 psi 	 changeover working well  	  	 




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