Diffusion Morning Report 04/25/06

Ted Berg tberg at snf.stanford.edu
Tue Apr 25 06:31:21 PDT 2006


Good Morning All,
    Looking fair this morning. Tylan 2 and 3 have issues, Epi had over 
pressure alarm, LTO is down for pull and clean. Everything else looks OK 
for now.

Diffusion 	  	  	  	  	 
  	Date: 	4/25/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	Up 	  	  	  	 
Tylan 2 	Down 	MFC alarms 	  	  	 
Tylan 3 	Down 	door problems 	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	Up 	  	19.5/30 	  	 
Tylan 8-SiGe 	Up 	  	28.46/30 	  	 
Tylan 9-Poly 	Up 	  	2.0/30 	  	 
Tylan 10-Nitride 	Up 	  	23.3/30 	  	 
Tylan 11-BPSG-LTO 	Down 	Pull and clean 	0/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	  	  	  	 
Thermco Nitride 	Down 	Testing 	  	  	 
  	  	  	  	  	 
Epi 	yellow 	 high leak rate/over pressure 	  	  	 
  	  	  	  	  	 
Burn Box 	Up 	  	  	  	 
ZYGO 	up 	  	   	  	 
  	  	  	  	  	 
GAAS 22 	UP 	  	  	  	 
GAAS 23 	up 	  	  	  	 
  	  	  	  	  	 
SiH4 for furnaces 	  	A on line 600 psi 	 changeover working well  	  	 


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