Diffusion Morning Report 04/27/06

Ted Berg tberg at snf.stanford.edu
Thu Apr 27 06:26:30 PDT 2006


Good Morning All,
    Looking OK this morning. Epi is down for contactor not sensed. LTO 
had reported low dep rate. No other major issues at this time.

Diffusion 	  	  	  	  	 
  	Date: 	4/27/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	Up 	  	  	  	 
Tylan 2 	Up 	  	  	  	 
Tylan 3 	Up 	  	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	Up 	  	19.5/30 	  	 
Tylan 8-SiGe 	Up 	  	28.46/30 	  	 
Tylan 9-Poly 	Up 	  	2.16/30 	  	 
Tylan 10-Nitride 	Up 	  	23.3/30 	  	 
Tylan 11-BPSG-LTO 	yellow 	low dep rate 	3.1/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	  	  	  	 
Thermco Nitride 	Down 	Testing 	  	  	 
  	  	  	  	  	 
Epi 	down 	contactor not sensed 	  	  	 
  	  	  	  	  	 
Burn Box 	Up 	  	  	  	 
ZYGO 	up 	  	   	  	 
  	  	  	  	  	 
GAAS 22 	UP 	  	  	  	 
GAAS 23 	up 	  	  	  	 
  	  	  	  	  	 
SiH4 for furnaces 	  	A on line 590 psi 	 changeover working well  	  	 


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20060427/ddadb1a0/attachment.html>


More information about the diffusion mailing list