Diffusion Morning report 12/01/06

Ted Berg tberg at stanford.edu
Fri Dec 1 06:39:16 PST 2006


Good Morning All,
    Looking good this morning. Looks like the POCL3 leak was resolved by 
changing the tube-will verify. Spent all day yesterday leak checking Epi.
It is getting closer.  Burn box cleaned this morning. AMAT waiting for 
process people return. TEL- had contractors in to quote on electrical 
and chopping off
current plumbing.  No Other issues at this time.

Diffusion 	  	  	  	  	 
  	Date: 	12/1/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	Up 	  	  	  	 
Tylan 2 	Up 	  	  	  	 
Tylan 3 	Up 	  	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	down 	possible leak 	  	  	 
Tylan 7-TEOS2 	Up 	  	9.25/30 	  	 
Tylan 8-SiGe 	Up 	  	9.13/30 	  	 
Tylan 9-Poly 	Up 	  	18.23/30 	  	 
Tylan 10-Nitride 	Up 	  	24.34/30 	  	 
Tylan 11-BPSG-LTO 	UP 	  	24.67/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	  	  	  	 
Thermco Nitride 	Up 	  	  	  	 
Epi 	down 	leak testing 	  	  	 
  	
	
	
	
	
Burn Box 	up 	 cleaned this morning
	  	  	 
ZYGO 	Up 	  	  	  	 
  	up 	  	   	  	 
GAAS 22 	  	  	  	  	 
GAAS 23 	UP 	  	  	  	 
SiH4 for furnaces 	up 	  	  	  	 

	  	A on line 560 psi 	 changeover working well  	  	 


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