Diffusion Morning Report 12/05/06

Ted Berg tberg at stanford.edu
Tue Dec 5 06:29:25 PST 2006


Good morning all,
    Looking good this morning.  Had ASM in yesterday to look at the  Epi 
and their recommendation was to fix the leak. We will try and accomplish 
that.
Tylan burn box back pressure was high-cleaning. No other problems at 
this time. AMAT process will be here today to continue quals.  TEL 
waiting initial quotes.

Diffusion 	  	  	  	  	 
  	Date: 	12/5/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	Up 	  	  	  	 
Tylan 2 	Up 	  	  	  	 
Tylan 3 	Up 	  	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	Up 	  	9.25/30 	  	 
Tylan 8-SiGe 	Up 	  	9.13/30 	  	 
Tylan 9-Poly 	Up 	  	18.63/30 	  	 
Tylan 10-Nitride 	Up 	  	27.49/30 	  	 
Tylan 11-BPSG-LTO 	UP 	  	26.89/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	  	  	  	 
Thermco Nitride 	Up 	  	  	  	 
Epi 	down 	leak testing 	  	  	 
  	
	
	
	
	
Burn Box 	up 	  	  	  	 
ZYGO 	Up 	  	  	  	 
  	up 	  	   	  	 
GAAS 22 	  	  	  	  	 
GAAS 23 	UP 	  	  	  	 
SiH4 for furnaces 	up 	  	  	  	 

	  	A on line 550 psi 	 changeover working well  	  	 


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