Diffusion Morning Report 12/11/06

Ted Berg tberg at stanford.edu
Mon Dec 11 06:45:06 PST 2006


Good Morning  All,
    Looking OK this morning. Spent all day Friday looking for leaks with 
FS on Epi found several small ones .still looking.  TEOS has low 
pressure-looking into it.
SiGe cylinder change.  Tylan burn box pressure high- cleaning.  AMAT  
process qual -waiting for results, more processing this week.  TEL  
writing PO for demo work. No other issues at this time.


Diffusion 	  	  	  	  	 
  	Date: 	12/11/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	Up 	  	  	  	 
Tylan 2 	Up 	  	  	  	 
Tylan 3 	Up 	  	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	down 	Low pressure 	9.25/30 	  	 
Tylan 8-SiGe 	down 	GeH4 cylinder change 	10.86/30 	  	 
Tylan 9-Poly 	Up 	  	19.38/30 	  	 
Tylan 10-Nitride 	Up 	  	27.99/30 	  	 
Tylan 11-BPSG-LTO 	UP 	  	32.19/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	  	  	  	 
Thermco Nitride 	Up 	  	  	  	 
Epi 	down 	leak testing 	  	  	 
  	
	
	
	
	
Burn Box 	up 	  	  	  	 
ZYGO 	Up 	  	  	  	 
  	up 	  	   	  	 
GAAS 22 	  	  	  	  	 
GAAS 23 	UP 	  	  	  	 
SiH4 for furnaces 	up 	  	  	  	 

	  	A on line 540 psi 	 changeover working well  	  	 




 
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20061211/27673fa3/attachment.html>


More information about the diffusion mailing list