Diffusion Morning Report 02/01/06

Ted Berg tberg at snf.stanford.edu
Wed Feb 1 06:33:46 PST 2006

Good Morning All,
    Looking good this morning. LTO is back up with new style boats. 
Nitride is down for pull and clean. Second FGA tube should be back up
today after quartz repair. Everything else looks OK for now.

  	Date: 	2/1/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	15.7/30
Tylan 9-Poly 	Up 	  	2.42/30
Tylan 10-Nitride 	Down 	pull and clean 	0/30 
Tylan 11-BPSG-LTO 	up 	 ok with new boats 	0/30
Tylan 12-FGA 	Up 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
GAAS 22 	UP 	  	 
GAAS 23 	down 	Broken elephant & tube 	 
SiH4 for furnaces 	  	A on line 330 	 changeover working well 

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