Diffusion Morning report 02/03/06

Ted Berg tberg at snf.stanford.edu
Fri Feb 3 06:40:09 PST 2006


Good Morning All,
    Looking good this morning. Nitride is back up after clean. Thermco 1 
has a low dep rate-possible torch issue. HCL leak check was good so we 
will switch
cylinders today. Everything else looks ok for now.

  	Date: 	2/3/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	15.7/30
Tylan 9-Poly 	Up 	  	2.42/30
Tylan 10-Nitride 	Up 	  	.075/30 
Tylan 11-BPSG-LTO 	up 	  	2.42/30
Tylan 12-FGA 	Up 	  	 
  	  	  	 
Thermco 1 	Down 	torch problem? 	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
  	  	  	 
Burn Box 	Up 	Cleaned this morning 	 
ZYGO 	up 	  	  
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	up 	  	 
  	  	  	 
SiH4 for furnaces 	  	A on line 330 	 changeover working well 


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