Diffusion Morning Report 02/06/06
tberg at snf.stanford.edu
Mon Feb 6 07:47:04 PST 2006
Good Morning All,
Looking ok this morning. Addressed several issues from over the
weekend tylan 1 and nitride door. Reset Epi doing leak check now.
Several small problems. Everything else looks OK for now.
Date: 2/6/2006 THICKNESS-Change at
Tube Name/Number Status Comments
Tylan 1 Up Checked out door issue
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-TEOS2 Up
Tylan 8-SiGe Up 15.7/30
Tylan 9-Poly Up 4.2/30
Tylan 10-Nitride Up Adjusted door-observing 2.09/30
Tylan 11-BPSG-LTO up 4.02/30
Tylan 12-FGA Up
Thermco 1 Down torch problem?
Thermco 2 Up
Thermco Poly Up
Thermco Nitride Down Testing
Burn Box Up
GAAS 22 UP
GAAS 23 up
SiH4 for furnaces A on line 330 changeover working well
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