Diffusion Morning Report 02/08/06

Ted Berg tberg at snf.stanford.edu
Wed Feb 8 06:32:06 PST 2006

Good Morning All,
    Looking good this morning. Some complaints about Epi base pressure 
but people are still using it non-stop so it is impossible to address 
the vacuum issues.
Still investigating the low dep issues on Thermco1. Everything else 
looks OK for now.

  	Date: 	2/8/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	15.7/30
Tylan 9-Poly 	Up 	  	8.96/30
Tylan 10-Nitride 	Up 	  	2.17/30
Tylan 11-BPSG-LTO 	up 	  	7.48/30
Tylan 12-FGA 	Up 	  	 
Thermco 1 	Down 	torch problem? 	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
GAAS 22 	UP 	  	 
GAAS 23 	up 	  	 
SiH4 for furnaces 	  	A on line 330 	 changeover working well 

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