Diffusion Morning Report 02/09/06

Ted Berg tberg at snf.stanford.edu
Thu Feb 9 07:47:48 PST 2006


Good Morning All,
    Looking good thid morning. Epi pressure and leak rate are 
good-observing HCl panel. Checking out low dep rate on Thermco1.
LTO and Poly- long Deps. Everything else looks OK for now.

  	Date: 	2/9/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	15.7/30
Tylan 9-Poly 	Up 	  	8.96/30
Tylan 10-Nitride 	Up 	  	2.17/30
Tylan 11-BPSG-LTO 	up 	  	7.48/30
Tylan 12-FGA 	Up 	  	 
  	  	  	 
Thermco 1 	Down 	torch problem? 	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	up 	  	 
  	  	  	 
SiH4 for furnaces 	  	A on line 260 	 changeover working well 


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