Diffusion Morning Report 02/13/06
tberg at snf.stanford.edu
Mon Feb 13 06:50:30 PST 2006
Good Morning All,
Looking fair this morning. Quite a few problems over the weekend.
Epis pump was off -low oil, TEOS ampule needs changing,
Torch on Tylan 3 replaced-bad uniformity, Tylan 1 had TCU error-testing,
Tylan2 had MFS error-testing. Everything else looks OK for now.
Date: 2/11/2006 THICKNESS-Change at
Tube Name/Number Status Comments
Tylan 1 yellow Had TCU error
Tylan 2 yellow Had MFS alarm
Tylan 3 yellow bad uniformity-changing torch
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-TEOS2 Down teos change
Tylan 8-SiGe Up 16.46/30
Tylan 9-Poly Up 16.67/30
Tylan 10-Nitride Up 2.17/30
Tylan 11-BPSG-LTO up 12.81/30
Tylan 12-FGA Up
Thermco 1 Down torch problem?
Thermco 2 Up
Thermco Poly Up
Thermco Nitride Down Testing
Burn Box Up
GAAS 22 UP
GAAS 23 up
SiH4 for furnaces A on line 250 changeover working well
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