Diffusion Morning Report 02/15/06

Ted Berg tberg at snf.stanford.edu
Wed Feb 15 07:00:49 PST 2006

Good Morning All,
    Looking  OK this morning. TEOS2 is out  of TEOS after only 2 days. 
TYlan3 still has uniformity issues-checking it out. Thermco1 is back 
after MFC change and ratio adjustment. Looking into Poly loader and 
Nitride door issues.  Everything else is OK for now.

  	Date: 	2/15/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	yellow 	checking uniformity issues 	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Down 	TEOS empty after 2 days 	 
Tylan 8-SiGe 	Up 	  	16.8/30
Tylan 9-Poly 	Up 	  	16.86/30
Tylan 10-Nitride 	yellow 	door issue 	3.83/30
Tylan 11-BPSG-LTO 	up 	  	15.055/30
Tylan 12-FGA 	Up 	  	 
Thermco 1 	Up 	 replaced mfc  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
GAAS 22 	UP 	  	 
GAAS 23 	up 	  	 
SiH4 for furnaces 	  	A on line 220 	 changeover working well 

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