Diffusion Morning Report 02/16/06

Ted Berg tberg at snf.stanford.edu
Thu Feb 16 09:32:16 PST 2006


Good Morning All,
    Looking Fair this morning. Changed HCl cylinder for Epi, Replaced 
bad bearings on Poly.  Looks like there may be a further problem with poly/.
Everything else looks OK for now.

  	Date: 	2/16/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	yellow 	checking uniformity issues 	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	 17.34/30
Tylan 9-Poly 	Down 	bad bearings 	17.21/30
Tylan 10-Nitride 	yellow 	door issue 	5.83/30
Tylan 11-BPSG-LTO 	up 	  	18.13/30
Tylan 12-FGA 	Up 	  	 
  	  	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	up 	  	 
  	  	  	 
SiH4 for furnaces 	  	A on line 220 	 changeover working well 


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