Diffusion Morning Report

Raymond Seymour seymour at snf.stanford.edu
Fri Feb 17 08:19:29 PST 2006


Morning all,

Mike is working on the door seal for nitride. Poly needs a test after pull
and clean. Epi needs HCL flow3d through the tool for a short period after
cylinder change. Burnbox for LPCVD's cleaned this morning. And Teos source
is in the process of being replaced. 

 


 

Date:

2/17/2006

THICKNESS-Change at


Tube Name/Number

Status

Comments

 


Tylan 1

Up

 

 


Tylan 2

Up

 

 


Tylan 3

Up

 

 


Tylan 4

Up

 

 


Tylan 5-BBr3

Up

 

 


Tylan 6-POCl3

Up

 

 


Tylan 7-TEOS2

Up

 

 


Tylan 8-SiGe

Up

 

17.34/30


Tylan 9-Poly

Down

bad bearings

0/30


Tylan 10-Nitride

yellow

door issue

5.84/30


Tylan 11-BPSG-LTO

up

 

18.63/30


Tylan 12-FGA

Up

 

 


 

 

 

 


Thermco 1

Up

 

 


Thermco 2

Up

 

 


Thermco Poly

Up

 

 


Thermco Nitride

Down

Testing

 


 

 

 

 


Burn Box

Up

 

 


ZYGO

up

 

  


 

 

 

 


GAAS 22

UP

 

 


GAAS 23

up

 

 


 

 

 

 


SiH4 for furnaces

 

A on line 200

 

 

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