Diffusion Morning Report 02/21/06

Ted Berg tberg at snf.stanford.edu
Tue Feb 21 07:19:56 PST 2006


Good Morning  All,
    Looking OK this morning. SiGe is down for pump replacement. Forming 
gas for Second forming gas tube is empty. HCl for epi needs change.
Poly has high base pressure-looking into it.

  	Date: 	2/21/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Down 	Pump bad 	 17.34/30
Tylan 9-Poly 	yellow 	high pressure 	3.5/30
Tylan 10-Nitride 	Up 	  	6.73/30
Tylan 11-BPSG-LTO 	up 	  	24/30
Tylan 12-FGA 	Up 	  	 
  	  	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	down 	forming gas empty 	 
  	  	  	 
SiH4 for furnaces 	  	A on line 180 	 changeover working well 


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20060221/4eced0af/attachment.html>


More information about the diffusion mailing list