From tberg at snf.stanford.edu Wed Jan 4 06:57:18 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 04 Jan 2006 06:57:18 -0800 Subject: Diffusion Morning Report 01/04/06 Message-ID: <43BBE24E.7010805@snf.stanford.edu> Good Morning All, Welcome back. Well we are still trying to recover in Diffusion Land. All oxides had TLC clean and should be OK. LPs had tests but results were not exactly what we expected-SiH4 did not flow on poly and LTO so they are running again. Epi is down waiting for burn box rebuild. Hopefully we will be back to full speed ahead by a bit later this morning. Date: 1/4/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 13.5/30 Tylan 9-Poly yellow testing 7.76/30 Tylan 10-Nitride yellow testing 13.27/30 Tylan 11-BPSG-LTO yellow testing 15.52/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces A on line 160 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jan 5 07:10:07 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 05 Jan 2006 07:10:07 -0800 Subject: Diffusion Morning Support 01/05/06 Message-ID: <43BD36CF.2040701@snf.stanford.edu> Good Morning All, Still recovering from shutdown. Nitride is back up, oxides back up. Poly and LTO still thin running dummy runs to flush lines.. Epi burn box is back together and hopefully will be back up today. Thermco LP still have base pressure issues. Everything else looks OK for now. Date: 1/5/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 13.5/30 Tylan 9-Poly yellow testing 7.96/30 Tylan 10-Nitride Up 15.15/30 Tylan 11-BPSG-LTO yellow testing 15.52/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces A on line 160 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jan 6 06:57:42 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 06 Jan 2006 06:57:42 -0800 Subject: Diffusion morning Report 01/06/07 Message-ID: <43BE8566.10500@snf.stanford.edu> Good morning All, Looking fair this morning. Still trying to recover from shutdown. Epi burnbox going back together again. Polys and LTO testing again(still) Tylan burn box cleaned this morning. Everything else looks OK for now. Date: 1/6/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 13.5/30 Tylan 9-Poly yellow testing 8.06/30 Tylan 10-Nitride Up 15.42/30 Tylan 11-BPSG-LTO yellow testing 15.59/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces A on line 160 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From service at usaa.com Fri Jan 6 20:08:18 2006 From: service at usaa.com (USAA BANK) Date: Fri, 6 Jan 2006 23:08:18 -0500 (EST) Subject: Verify Your Credit Card Information Message-ID: <20060107040818.C524D6BFEFA@WallaceGraphicsServer> An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jan 9 06:29:22 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 09 Jan 2006 06:29:22 -0800 Subject: Diffusion Morning Report 01/09/06 Message-ID: <43C27342.4080809@snf.stanford.edu> Good Morning All, Looking better this morning. Tylan poly and Epi are back up. LTO has higher dep rate than normal-looking into it. TEOS2 is down for O2 MFC. Everything else looks OK for now. Date: 1/9/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 13.5/30 Tylan 9-Poly Up 9.61/30 Tylan 10-Nitride Up 16.38/30 Tylan 11-BPSG-LTO yellow testing 17.65/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces A on line 460 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jan 10 06:24:19 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 10 Jan 2006 06:24:19 -0800 Subject: Diffusion Morning Report 01/10/06 Message-ID: <43C3C393.50906@snf.stanford.edu> Good Morning All, Looking good this morning. All of the LPs except TEOS2 are back up and diffusion is looking good. TEOS2 tube was pulled and cleaned while O2 MFC is being repaired. Everything else looks OK for now. Date: 1/10/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 13.5/30 Tylan 9-Poly Up 9.77/30 Tylan 10-Nitride Up 16.89/30 Tylan 11-BPSG-LTO Up 18.33/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces A on line 460 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jan 11 07:21:40 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 11 Jan 2006 07:21:40 -0800 Subject: Diffusion Morning Report 01/11/06 Message-ID: <43C52284.7030207@snf.stanford.edu> Good Morning All, Looking pretty good this morning. TEOS2 going back together after pull and clean.. POCl3 had a tipped baffle-looking into it. Epi had a GeH4 flow issue that is resolved. Someone left the Thermco poly tube open. Everything else looks OK for now. Date: 1/11/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 yellow tipped baffle Tylan 7-TEOS2 Up Tylan 8-SiGe Up 13.5/30 Tylan 9-Poly Up 12.27/30 Tylan 10-Nitride Up 17.25/30 Tylan 11-BPSG-LTO Up 20.68/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces A on line 460 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jan 12 06:23:10 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 12 Jan 2006 06:23:10 -0800 Subject: Diffusion Morning Report 01/12/06 Message-ID: <43C6664E.3040008@snf.stanford.edu> Good Morning All, Looking good this morning. TEOS2 is back together and waiting for test results.Tylan 2 needs test after injector change .Everything else looks OK for now. Date: 1/11/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Down Needs test after injector change Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 13.5/30 Tylan 9-Poly Up 14.97/30 Tylan 10-Nitride Up 18.57/30 Tylan 11-BPSG-LTO Up 20.68/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces A on line 440 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jan 13 06:26:00 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 13 Jan 2006 06:26:00 -0800 Subject: Diffusion Morning Report 01/13/06 Message-ID: <43C7B878.1000002@snf.stanford.edu> Good Morning All, Looking good this morning. TEOS2 is back up after pull and clean. Burn box cleaned this morning. Everything is looking good at this time. Date: 1/13/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 13.5/30 Tylan 9-Poly Up 17.7/30 Tylan 10-Nitride Up 20.52/30 Tylan 11-BPSG-LTO Up 20.68/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up Cleaned this morning ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces A on line 440 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jan 17 07:34:31 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 17 Jan 2006 07:34:31 -0800 Subject: Diffusion Morning Report 01/17/06 Message-ID: <43CD0E87.7080005@snf.stanford.edu> Good Morning All, Not looking great this morning. I think we must have had a power glitch. Ebeam cry compressor was dead blown fuse-regening cryos. TYlan bank2 is dead found one blown fuse still trying to get it back up. Tylan one had a broken wafer in the tube and a cracked cantilever sheath. Everything else seems to be OK for now. Date: 1/17/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Down Sheath cracked and broken wafer Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Down bank dead Tylan 6-POCl3 Down bank dead Tylan 7-TEOS2 Down bank dead Tylan 8-SiGe Down bank dead 13.5/30 Tylan 9-Poly Up 17.8/30 Tylan 10-Nitride Up 21.02/30 Tylan 11-BPSG-LTO Up 20.94/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces A on line 420 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jan 18 06:28:34 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 18 Jan 2006 06:28:34 -0800 Subject: Diffusion Morning Report 01/18/06 Message-ID: <43CE5092.4020304@snf.stanford.edu> Good Morning All, Looking better this morning. Tylan 1 is back up as are Ebeam and SiGe. Bank 2 still has major problems with tube 5 and 6-looking into issues.Epi is down for HCl cylinder change-it will be 24 hrs for leak check. Everything else looks OK for now. Date: 1/18/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Sheath replaced Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Down tube dead Tylan 6-POCl3 Down tube dead Tylan 7-TEOS2 Down checking it out Tylan 8-SiGe Up replaced several fuses 13.5/30 Tylan 9-Poly Up 17.8/30 Tylan 10-Nitride Up 21.02/30 Tylan 11-BPSG-LTO Up 20.96/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces A on line 420 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jan 19 06:32:38 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 19 Jan 2006 06:32:38 -0800 Subject: Diffusion Morning Report 01/19/06 Message-ID: <43CFA306.4060704@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Tylan HBR is still down but the rest of bank2 is back up after replacing numerous fuses and a power supply. Epi HCL cylinder change went well and it should be up this morning. Everything else looks OK for now. Date: 1/19/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Down Bad power supply-ordered Tylan 6-POCl3 Up Replaced power supply inslave Tylan 7-TEOS2 Up Tylan 8-SiGe Up 13.5/30 Tylan 9-Poly Up 17.8/30 Tylan 10-Nitride Up 21.02/30 Tylan 11-BPSG-LTO Up 24.46/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces A on line 420 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jan 20 08:20:07 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 20 Jan 2006 08:20:07 -0800 Subject: Diffusion Morning Report 01/20/06 Message-ID: <43D10DB7.8000408@snf.stanford.edu> Good Morning All, Looking OK this morning. Burn box cleaned this morning. SiGe has a problem-cannot go to auto on MFS Mike adjusted door on TEOS2. Waiting for PS for tube5. Everything else is OK for Now. Date: 1/20/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Down tube dead Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe down No Auto 13.82/30 Tylan 9-Poly Up 24.58/30 Tylan 10-Nitride Up 21.02/30 Tylan 11-BPSG-LTO Up 24.46/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces A on line 395 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jan 23 06:38:39 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 23 Jan 2006 06:38:39 -0800 Subject: Diffusion Morning Report 01/23/06 Message-ID: <43D4EA6E.7080106@snf.stanford.edu> Good Morning All, Looking good this morning. FGA is waiting a sensor fo H2, Tylan5 is waiting Power supply, should be here today. Poly is close to tube change, we have reservations for Wed. Everything else looks OK for now. Date: 1/23/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Down tube dead Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 14.18/30 Tylan 9-Poly Up 28.9/30 Tylan 10-Nitride Up 23.2/30 Tylan 11-BPSG-LTO Up 25.58/30 Tylan 12-FGA Down Needs H2 sensor Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces A on line 380 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jan 24 06:23:38 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 24 Jan 2006 06:23:38 -0800 Subject: Diffusion Morning Report 01/25/06 Message-ID: <43D6386A.2010608@snf.stanford.edu> Good Morning All, Looking OK this morning. FGA and TEOS2 are down Everything else looks alright for now. Working on Thermco 2 bank. Date: 1/25/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up replaced power supply Tylan 6-POCl3 Up Tylan 7-TEOS2 Down won't pump down Tylan 8-SiGe Up 14.18/30 Tylan 9-Poly Up 29.05/30 Tylan 10-Nitride Up 23.27/30 Tylan 11-BPSG-LTO Up 26.02/30 Tylan 12-FGA Down leak errors Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces A on line 375 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jan 25 07:48:05 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 25 Jan 2006 07:48:05 -0800 Subject: Diffusion Morning Report 1/25/06 Message-ID: <43D79DB5.7050002@snf.stanford.edu> Good Morning All, Well, we have had better days. Epi had an accident last night and is now in a million or so pieces-we are looking into it. Poly is down for pull and clean. LTO had a broken sheath that was replaced. FGA is back up after sensor replacement. Everything else looks OK for now. Date: 1/25/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up adjusted door Tylan 8-SiGe Up 14.18/30 Tylan 9-Poly Up 29.05/30 Tylan 10-Nitride Up 23.89/30 Tylan 11-BPSG-LTO Up replaced broken sheath 26.43/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces A on line 360 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jan 26 07:11:05 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 26 Jan 2006 07:11:05 -0800 Subject: Diffusion Morning Report 01/26/01 Message-ID: <43D8E689.6010400@snf.stanford.edu> Good Morning All, Looking OK this morning. Epi is cleaned up and is going back together. Poly is back up after pull and clean. TEOS2 is not making the door for pumpdown again. FGA has phantom alarms again. Everything else looks OK for now. Date: 1/26/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Down won't pump Tylan 8-SiGe Up 14.18/30 Tylan 9-Poly Up Pull and clean complete .17/30 Tylan 10-Nitride Up 23.95/30 Tylan 11-BPSG-LTO Up 28.99/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces A on line 360 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jan 27 07:05:00 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 27 Jan 2006 07:05:00 -0800 Subject: Diffusion Morning Report 01/27/06 Message-ID: <43DA369C.8080308@snf.stanford.edu> Good Morning All, Looking pretty good today. Epi is going back together . Burn box cleaned this morning. GAAS3 is down for a cracked elephant and stuck end cap. Everything else is ok for now.. Date: 1/27/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 14.43/30 Tylan 9-Poly Up .4/30 Tylan 10-Nitride Up 23.95/30 Tylan 11-BPSG-LTO Up 29.29/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 yellow Broken elephant SiH4 for furnaces A on line 360 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Fri Jan 27 12:25:18 2006 From: nanotech at nsti.org (Nano World News) Date: Fri, 27 Jan 2006 12:25:18 -0800 Subject: Nano World News January 2006 Message-ID: An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jan 30 06:37:08 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 30 Jan 2006 06:37:08 -0800 Subject: Diffusion Morning Report 01/30/06 Message-ID: <43DE2494.5040705@snf.stanford.edu> Good Morning All, Looking good this morning. Epi is back up(thanks Mike D., Maurice, and Ted) wonderful quick turn around, GeH4 will be turned on today. Poly is down for scheduled pull and clean although user went over by an hour and a half. Nitride will be going down for pull and clean on Wed. Everything else looks OK for now. GAAS23 the second FGA tube is down for a broken tube-out for repair. Date: 1/30/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 14.92/30 Tylan 9-Poly Up 1.54/30 Tylan 10-Nitride Up 26.11/30 Tylan 11-BPSG-LTO Down pull and clean 0/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 down Broken elephant & tube SiH4 for furnaces A on line 340 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jan 31 06:27:30 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 31 Jan 2006 06:27:30 -0800 Subject: Diffusion Morning Report01/31/07 Message-ID: <43DF73D2.9060409@snf.stanford.edu> Good Morning All, Looking pretty good this morning. LTO is back together waiting test with new style boats. Nitride is going down tomorrow for pull and clean. Some comments on Epi film quality and poly uniformity. Second FGA tube out for repair. Everything else looks OK for now. Date: 1/31/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up Tylan 8-SiGe Up 14.92/30 Tylan 9-Poly Up 1.87/30 Tylan 10-Nitride Up 26.11/30 Tylan 11-BPSG-LTO Down pull and clean done needs test 0/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 down Broken elephant & tube SiH4 for furnaces A on line 340 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: