Diffusion Morning Support 01/05/06

Ted Berg tberg at snf.stanford.edu
Thu Jan 5 07:10:07 PST 2006

Good Morning All,
    Still recovering from shutdown.  Nitride is back up, oxides back 
up.  Poly and LTO still thin running dummy runs to flush lines.. Epi 
burn box is back together and hopefully will be back up today.  Thermco 
LP still have base pressure issues.  Everything else looks OK for now.

  	Date: 	1/5/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	13.5/30
Tylan 9-Poly 	yellow 	testing 	7.96/30
Tylan 10-Nitride 	Up 	  	15.15/30 
Tylan 11-BPSG-LTO 	yellow 	testing 	15.52/30
Tylan 12-FGA 	Up 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing 	 
Thermco Nitride 	Down 	Testing 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	A on line 160 	 changeover working well 

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