Diffusion Morning Report 01/09/06

Ted Berg tberg at snf.stanford.edu
Mon Jan 9 06:29:22 PST 2006


Good Morning All,
    Looking better this morning. Tylan poly and Epi are back up. LTO has 
higher dep rate than normal-looking into it. TEOS2 is down for O2 MFC. 
Everything else looks OK for now.

  	Date: 	1/9/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	13.5/30
Tylan 9-Poly 	Up 	  	9.61/30
Tylan 10-Nitride 	Up 	  	16.38/30 
Tylan 11-BPSG-LTO 	yellow 	testing 	17.65/30
Tylan 12-FGA 	Up 	  	 
  	  	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	A on line 460 	 changeover working well 


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