Diffusion Morning Report 01/11/06

Ted Berg tberg at snf.stanford.edu
Wed Jan 11 07:21:40 PST 2006


Good Morning All,
    Looking pretty good this morning. TEOS2 going back together after 
pull and clean.. POCl3 had a tipped baffle-looking into it. Epi had a 
GeH4 flow issue
that is resolved.  Someone left the Thermco poly tube open.  Everything 
else looks OK for now.

  	Date: 	1/11/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	yellow 	tipped baffle 	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	13.5/30
Tylan 9-Poly 	Up 	  	12.27/30
Tylan 10-Nitride 	Up 	  	17.25/30 
Tylan 11-BPSG-LTO 	Up 	  	20.68/30
Tylan 12-FGA 	Up 	  	 
  	  	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	A on line 460 	 changeover working well 


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