Diffusion Morning Report 01/17/06

Ted Berg tberg at snf.stanford.edu
Tue Jan 17 07:34:31 PST 2006


Good Morning All,
    Not looking great this morning.  I think we must have had a power 
glitch. Ebeam cry compressor was dead blown fuse-regening cryos. TYlan 
bank2 is dead found one blown fuse still trying to get it back up. Tylan 
one had a broken wafer in the tube and a cracked cantilever sheath. 
Everything else seems to be OK for now.

  	Date: 	1/17/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Down 	Sheath cracked and broken wafer 	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Down 	bank dead 	 
Tylan 6-POCl3 	Down 	bank dead 	 
Tylan 7-TEOS2 	Down 	bank dead 	 
Tylan 8-SiGe 	Down 	bank dead 	13.5/30
Tylan 9-Poly 	Up 	  	17.8/30
Tylan 10-Nitride 	Up 	  	21.02/30 
Tylan 11-BPSG-LTO 	Up 	  	20.94/30
Tylan 12-FGA 	Up 	  	 
  	  	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	A on line 420 	 changeover working well 


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