Diffusion Morning Report 01/18/06

Ted Berg tberg at snf.stanford.edu
Wed Jan 18 06:28:34 PST 2006

Good Morning All,
    Looking better this morning. Tylan 1 is back up as are Ebeam and 
SiGe. Bank 2 still has major problems with tube 5 and 6-looking into
issues.Epi is down for HCl cylinder change-it will be 24 hrs for leak 
check.  Everything else looks OK for now.

  	Date: 	1/18/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	Sheath replaced 	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Down 	tube dead 	 
Tylan 6-POCl3 	Down 	tube dead 	 
Tylan 7-TEOS2 	Down 	checking it out
Tylan 8-SiGe 	Up 	replaced several fuses 	13.5/30
Tylan 9-Poly 	Up 	  	17.8/30
Tylan 10-Nitride 	Up 	  	21.02/30 
Tylan 11-BPSG-LTO 	Up 	  	20.96/30
Tylan 12-FGA 	Up 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	A on line 420 	 changeover working well 

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