Diffusion Morning Report 01/19/06
tberg at snf.stanford.edu
Thu Jan 19 06:32:38 PST 2006
Good Morning All,
Looking pretty good this morning. Tylan HBR is still down but the
rest of bank2 is back up after replacing numerous fuses and a power supply.
Epi HCL cylinder change went well and it should be up this morning.
Everything else looks OK for now.
Date: 1/19/2006 THICKNESS-Change at
Tube Name/Number Status Comments
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Down Bad power supply-ordered
Tylan 6-POCl3 Up Replaced power supply inslave
Tylan 7-TEOS2 Up
Tylan 8-SiGe Up 13.5/30
Tylan 9-Poly Up 17.8/30
Tylan 10-Nitride Up 21.02/30
Tylan 11-BPSG-LTO Up 24.46/30
Tylan 12-FGA Up
Thermco 1 Up
Thermco 2 Up
Thermco Poly Up
Thermco Nitride Down Testing
Burn Box Up
GAAS 22 UP
GAAS 23 UP
SiH4 for furnaces A on line 420 changeover working well
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