Diffusion Morning Report 01/19/06

Ted Berg tberg at snf.stanford.edu
Thu Jan 19 06:32:38 PST 2006


Good Morning All,
    Looking pretty good this morning.  Tylan HBR is still down but the 
rest of bank2 is back up after replacing numerous fuses and a power supply.
Epi HCL cylinder change went well and it should be up this morning.  
Everything else looks OK for now.

  	Date: 	1/19/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Down 	Bad power supply-ordered
	 
Tylan 6-POCl3 	Up 	Replaced power supply inslave 	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	13.5/30
Tylan 9-Poly 	Up 	  	17.8/30
Tylan 10-Nitride 	Up 	  	21.02/30 
Tylan 11-BPSG-LTO 	Up 	  	24.46/30
Tylan 12-FGA 	Up 	  	 
  	  	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	A on line 420 	 changeover working well 


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