Diffusion Morning Report 01/20/06

Ted Berg tberg at snf.stanford.edu
Fri Jan 20 08:20:07 PST 2006

Good Morning All,
    Looking  OK this morning. Burn box cleaned this morning. SiGe has a 
problem-cannot go to auto on MFS Mike adjusted door on TEOS2.
Waiting for PS for tube5. Everything else is OK for Now.

  	Date: 	1/20/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Down 	tube dead 	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	down
	 No Auto
Tylan 9-Poly 	Up 	  	24.58/30
Tylan 10-Nitride 	Up 	  	21.02/30 
Tylan 11-BPSG-LTO 	Up 	  	24.46/30
Tylan 12-FGA 	Up 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	A on line 395 	 changeover working well 

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