Diffusion Morning Report 01/23/06

Ted Berg tberg at snf.stanford.edu
Mon Jan 23 06:38:39 PST 2006

Good Morning All,
    Looking good this morning. FGA is waiting a sensor fo H2, Tylan5 is 
waiting Power supply, should be here today. Poly is close to tube change,
we have reservations for Wed.  Everything else looks OK for now.

  	Date: 	1/23/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Down 	tube dead 	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	14.18/30
Tylan 9-Poly 	Up 	  	28.9/30
Tylan 10-Nitride 	Up 	  	23.2/30 
Tylan 11-BPSG-LTO 	Up 	  	25.58/30
Tylan 12-FGA 	Down
	Needs H2 sensor
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	A on line 380 	 changeover working well 

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