Diffusion Morning Report 01/25/06

Ted Berg tberg at snf.stanford.edu
Tue Jan 24 06:23:38 PST 2006

Good Morning All,
    Looking OK this morning. FGA and TEOS2 are down  Everything else 
looks alright for now. Working on Thermco 2 bank.

  	Date: 	1/25/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	replaced power supply 	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Down 	won't pump down 	 
Tylan 8-SiGe 	Up 	  	14.18/30
Tylan 9-Poly 	Up 	  	29.05/30
Tylan 10-Nitride 	Up 	  	23.27/30 
Tylan 11-BPSG-LTO 	Up 	  	26.02/30
Tylan 12-FGA 	Down
	leak errors
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	A on line 375 	 changeover working well 

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