Diffusion Morning Report 1/25/06

Ted Berg tberg at snf.stanford.edu
Wed Jan 25 07:48:05 PST 2006


Good Morning All,
    Well, we have had better days. Epi had an accident last night and is 
now in a million or so pieces-we are looking into it. Poly is down for 
pull and clean.
LTO had a broken sheath that was replaced. FGA is back up after sensor 
replacement.  Everything else looks OK for now.

  	Date: 	1/25/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	adjusted door 	 
Tylan 8-SiGe 	Up 	  	14.18/30
Tylan 9-Poly 	Up 	  	29.05/30
Tylan 10-Nitride 	Up 	  	23.89/30 
Tylan 11-BPSG-LTO 	Up 	replaced broken sheath 	26.43/30
Tylan 12-FGA 	Up 	  	 
  	  	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	A on line 360 	 changeover working well 


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