Diffusion Morning Report 01/26/01

Ted Berg tberg at snf.stanford.edu
Thu Jan 26 07:11:05 PST 2006


Good Morning All,
    Looking OK this morning.  Epi is cleaned up and is going back 
together. Poly is back up after pull and clean. TEOS2 is not making the 
door for
pumpdown again. FGA has phantom alarms again.  Everything else looks OK 
for now.

  	Date: 	1/26/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Down 	won't pump 	 
Tylan 8-SiGe 	Up 	  	14.18/30
Tylan 9-Poly 	Up 	Pull and clean complete 	.17/30
Tylan 10-Nitride 	Up 	  	23.95/30 
Tylan 11-BPSG-LTO 	Up 	  	28.99/30
Tylan 12-FGA 	Up 	  	 
  	  	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	A on line 360 	 changeover working well 


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