Diffusion Morning Report 01/27/06

Ted Berg tberg at snf.stanford.edu
Fri Jan 27 07:05:00 PST 2006


Good Morning All,
    Looking pretty good today. Epi is going back together . Burn box 
cleaned this morning.  GAAS3 is down for a cracked elephant and stuck
end cap. Everything else is ok for now..

  	Date: 	1/27/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	14.43/30
Tylan 9-Poly 	Up 	  	.4/30
Tylan 10-Nitride 	Up 	  	23.95/30 
Tylan 11-BPSG-LTO 	Up 	  	29.29/30
Tylan 12-FGA 	Up 	  	 
  	  	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	yellow 	Broken elephant 	 
  	  	  	 
SiH4 for furnaces 	  	A on line 360 	 changeover working well 


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