Diffusion Morning Report 01/30/06

Ted Berg tberg at snf.stanford.edu
Mon Jan 30 06:37:08 PST 2006

Good Morning All,
    Looking good this morning. Epi is back up(thanks Mike D., Maurice, 
and Ted) wonderful quick turn around, GeH4 will be turned on today.
Poly is down for scheduled pull and clean although user went over by an 
hour and a half. Nitride will be going down for pull and clean on Wed.
Everything else looks OK for now.  GAAS23 the second FGA tube is down 
for a broken tube-out for repair.

  	Date: 	1/30/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	14.92/30
Tylan 9-Poly 	Up 	  	1.54/30
Tylan 10-Nitride 	Up 	  	26.11/30 
Tylan 11-BPSG-LTO 	Down 	pull and clean 	0/30
Tylan 12-FGA 	Up 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
GAAS 22 	UP 	  	 
GAAS 23 	down 	Broken elephant & tube 	 
SiH4 for furnaces 	  	A on line 340 	 changeover working well 

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