Diffusion Morning Report01/31/07

Ted Berg tberg at snf.stanford.edu
Tue Jan 31 06:27:30 PST 2006


Good Morning All,
    Looking pretty good this morning. LTO is back together waiting test 
with new style boats. Nitride is going down tomorrow for pull and clean.
Some comments on Epi film quality and poly uniformity.  Second FGA tube 
out for repair.  Everything else looks OK for now.

  	Date: 	1/31/2006 	THICKNESS-Change at
Tube Name/Number 	Status 	Comments 	 
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	Up 	  	 
Tylan 8-SiGe 	Up 	  	14.92/30
Tylan 9-Poly 	Up 	  	1.87/30
Tylan 10-Nitride 	Up 	  	26.11/30 
Tylan 11-BPSG-LTO 	Down 	pull and clean done needs test 	0/30
Tylan 12-FGA 	Up 	  	 
  	  	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	Up 	  	 
Thermco Nitride 	Down 	Testing 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	  
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	down 	Broken elephant & tube 	 
  	  	  	 
SiH4 for furnaces 	  	A on line 340 	 changeover working well 


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