From tberg at snf.stanford.edu Mon Jul 3 06:33:18 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 03 Jul 2006 06:33:18 -0700 Subject: Diffusion Morning Report 07/03/06 Message-ID: <44A91C9E.1090703@snf.stanford.edu> Good Morning to the few who are here today, Looking good this morning so far. Epi HCl crossing over this morning. Tylan 1 is still down for TLC/O2 flow issues-investigating. LTO is coming close to pull and clean.SEM seems OK for now. Hitachi Ebeam has some issues see report later. AMAT epi install moving ahead. GeH4 install will be happening in about a week for as long as 2 weeks. Everything else looks OK for now. Diffusion Mike,Ray, Ted Date: 7/3/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Down flow issues Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe Up 33.96/30 Tylan 9-Poly Up 13.38/30 Tylan 10-Nitride Up 9.95/30 Tylan 11-BPSG-LTO yellow 28.26/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi Up Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 360 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Wed Jul 5 08:24:29 2006 From: seymour at snf.stanford.edu (Raymond Seymour) Date: Wed, 5 Jul 2006 08:24:29 -0700 Subject: diffusion morning Repost Message-ID: <008901c6a047$1c36bf70$9a6540ab@bigvtwin> Morning all, Ted chose to play musical work days today, he did come in Monday, and will be out tomorrow as well. My hottest issue this morning it Tylan1 and the temp problems on tylan2.All else looking good after America's birthday bash day. Diffusion Mike, Ray, Ted Date: 7/3/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Down flow issues Tylan 2 Down Temp control issues Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe Up 33.96/30 Tylan 9-Poly Up 15.33/30 Tylan 10-Nitride Up 10.13/30 Tylan 11-BPSG-LTO yellow 30.54/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi Up Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 350 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Thu Jul 6 08:47:56 2006 From: seymour at snf.stanford.edu (Raymond Seymour) Date: Thu, 6 Jul 2006 08:47:56 -0700 Subject: Diffusion Morning Report Message-ID: <00b201c6a113$8d296a30$9a6540ab@bigvtwin> Morning All, Started a clean on Tylan! last afternoon, Nancy monitored it and reported it was ok. She will do a process test this morning. Tylan4 Hydrogen flow does not match setp[oint and alarms. All else looking good. Diffusion Mike, Ray, Ted Date: 7/3/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Down Process testing Tylan 2 Up Tylan 3 Up Tylan 4 Down H2 MFS error Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe Up 33.96/30 Tylan 9-Poly Up 15.33/30 Tylan 10-Nitride Up 10.13/30 Tylan 11-BPSG-LTO yellow 31.4/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi Up Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 340 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jul 7 06:55:48 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 07 Jul 2006 06:55:48 -0700 Subject: Diffusion morning report 07/07/06 Message-ID: <44AE67E4.50909@snf.stanford.edu> Good Morning All, Looking good this morning . no major problems at this time. Burn box being cleaned this morning. Lamp changed in Epi. AMAT working on startup of ne Epi. Everything else is OK for now. Diffusion Mike,Ray, Ted Date: 7/7/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe Up 33.96/30 Tylan 9-Poly Up 15.33/30 Tylan 10-Nitride Up 10.13/30 Tylan 11-BPSG-LTO yellow 34.49/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi Up Burn Box Up cleaned this morning ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 320 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jul 10 06:36:00 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 10 Jul 2006 06:36:00 -0700 Subject: Diffusion Morning Report 07/10/06 Message-ID: <44B257C0.2040400@snf.stanford.edu> Good Morning All, Looking good this morning. LTO is down for scheduled Pull and clean..Thermco Poly has a leak. AMAT Epi was powered up last Friday and is being checked out.. Germane for SiGe will be going down next week for install into Thermco banks. Everything else looks OK for now. Diffusion Mike,Ray, Ted Date: 7/10/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe Up 33.96/30 Tylan 9-Poly Up 15.33/30 Tylan 10-Nitride Up 14.33/30 Tylan 11-BPSG-LTO Down Scheduled Pull and clean 0/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Down leak Thermco Nitride Down Testing Epi Up Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 290 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Tue Jul 11 08:12:50 2006 From: seymour at snf.stanford.edu (Raymond Seymour) Date: Tue, 11 Jul 2006 08:12:50 -0700 Subject: Diffusion morningreport Message-ID: <002a01c6a4fc$79fdd530$9a6540ab@bigvtwin> Morning All, Ted is at Semicon today. TylanBPSG clean completed, needs test. Thermco Poly gatevalve mounting bracket being modified and will go back together today. All else looking pretty good. Diffusion Mike, Ray, Ted Date: 7/11/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe Up 33.96/30 Tylan 9-Poly Up 15.33/30 Tylan 10-Nitride Up 15.97/30 Tylan 11-BPSG-LTO Down Needs test 0/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Down leak Thermco Nitride Down Testing Epi Up Burn Box Up ZYGO up GAAS 22 UP GAAS 23 Up SiH4 for furnaces A on line 280 PSI psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jul 12 06:54:07 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 12 Jul 2006 06:54:07 -0700 Subject: Diffusion Morning Report 07/12/06 Message-ID: <44B4FEFF.8020302@snf.stanford.edu> Good Morning All, Looking good this morning. TC sheath for Thermco Poly has been replaced, needs leak check and perhaps a test. LTO is back after pull and clean. No other major problems at this time, but Coral looks like it is down so it is hard to tell.. Diffusion Mike,Ray, Ted Date: 7/12/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe Up 33.96/30 Tylan 9-Poly Up 15.93/30 Tylan 10-Nitride Up 15.94/30 Tylan 11-BPSG-LTO Up .25/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Down Replaced TC sheath Thermco Nitride Down Testing Epi Up Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 290 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jul 13 06:29:22 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 13 Jul 2006 06:29:22 -0700 Subject: Diffusion Morning Report 07/13/06 Message-ID: <44B64AB2.90802@snf.stanford.edu> Good Morning All, Looking good this morning. Tylan 1 has a MFS alarm for N2 flow-looking into it. Thermco Poly is back together and needs a test. AMAT Epi Startup is moving ahead. Everything else looks OK for now. Diffusion Mike,Ray, Ted Date: 7/12/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 yellow MFS alarm N2 Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe Up 33.96/30 Tylan 9-Poly Up 15.93/30 Tylan 10-Nitride Up 16.16/30 Tylan 11-BPSG-LTO Up .95/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Down needs test Thermco Nitride Down Testing Epi Up Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 280 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jul 14 06:35:34 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 14 Jul 2006 06:35:34 -0700 Subject: Diffusion Morning Report 07/14/06 Message-ID: <44B79DA6.3000206@snf.stanford.edu> Good Morning All, Looking Good this morning. No major problems at this time. GeH4 shutdown will begin next week and will be down for about 2 weeks hopefully. Burnbox cleaned this morning. No Other issues at this time. AMAT epi install moving forward. Diffusion Mike,Ray, Ted Date: 7/14/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe Up 33.96/30 Tylan 9-Poly Up 15.93/30 Tylan 10-Nitride Up 16.16/30 Tylan 11-BPSG-LTO Up 4.3/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Running Fine Thermco Nitride Down Testing Epi Up Burn Box Up cleaned this morning ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 260 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jul 17 06:34:00 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 17 Jul 2006 06:34:00 -0700 Subject: Diffusion Morning Report 07/17/06 Message-ID: <44BB91C8.3080700@snf.stanford.edu> Good Morning All, Looking OK this morning. Poly, Tylan2,Epi are down -checking them out. Germane for Tylan will be going down today for tie in. AMAT epi is moving along. Everything else looks OK for now, Diffusion Mike,Ray, Ted Date: 7/117/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Down H2/O2 alarm Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe Up 33.96/30 Tylan 9-Poly Down leak 16.12/30 Tylan 10-Nitride Up 17.17/30 Tylan 11-BPSG-LTO Up 6.88/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Running Fine Thermco Nitride Down Testing Epi down facilities red light Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 260 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jul 18 06:34:35 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 18 Jul 2006 06:34:35 -0700 Subject: Diffusion Morning Report 07/18/06 Message-ID: <44BCE36B.9040109@snf.stanford.edu> Good Morning All, Looking good this morning. HCl cylinder for Epi crossed over. Germane for Tylans shut down for tie ins. AMAT Epi moving Ahead. No other problems at this time. Diffusion Mike,Ray, Ted Date: 7/18/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe Up 33.96/30 Tylan 9-Poly Up 16.76/30 Tylan 10-Nitride Up 17.17/30 Tylan 11-BPSG-LTO Up 6.88/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi Up changed HCl cylinder over Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 200 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jul 19 06:46:38 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 19 Jul 2006 06:46:38 -0700 Subject: Diffusion Morning Report 07/19/06 Message-ID: <44BE37BE.90502@snf.stanford.edu> Good Morning All, Looking good this morning.SiGe is down for GeH4 tie in and tube pull. Everything else looks OK for now. Diffusion Mike,Ray, Ted Date: 7/19/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe down GEH4 tie in and tube pull 0/30 Tylan 9-Poly Up 16.92/30 Tylan 10-Nitride Up 19.79/30 Tylan 11-BPSG-LTO Up 7.1/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi Up Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 200 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Wed Jul 19 11:30:52 2006 From: nanotech at nsti.org (NSTI) Date: Wed, 19 Jul 2006 11:30:52 -0700 Subject: Nanotech 2006 Conference Proceedings Message-ID: Nanotech 2006 Conference Technical Proceedings The Most Comprehensive Up-To-Date Body of Work! http://www.nsti.org/procs/ Couldn't Attend This Year? You can still benefit from the knowledge generated at the NSTI Nanotech Conference Series through this special offer. - 4 CD Set Special ? 25% off - 3 CD Set Special ? 15% discount http://www.nsti.org/procs/ --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jul 20 06:28:50 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 20 Jul 2006 06:28:50 -0700 Subject: Diffusion Morning Report Message-ID: <44BF8512.8080503@snf.stanford.edu> Good Morning All, Looking good this morning. Possible soft pump issue on LTO-checking it out. GEH4 line is installed and will be leak checked today. Amat Epi install moving ahead. No other problems at this time. Diffusion Mike,Ray, Ted Date: 7/20/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe down GEH4 tie in and tube pull 0/30 Tylan 9-Poly Up 17.14/30 Tylan 10-Nitride Up 19.89/30 Tylan 11-BPSG-LTO yellow Possible soft pump issues 10.27/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi Up Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 180 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jul 25 06:45:59 2006 From: tberg at stanford.edu (Ted Berg) Date: Tue, 25 Jul 2006 06:45:59 -0700 Subject: Diffusion Morning Report 07/25/06 Message-ID: <44C62097.9070704@stanford.edu> Good Morning All, Loooking good this morning. Nitride temp looks ok now will keep it yellow to observe. Gas testing for new Epi went well. GeH4 tie in is almost completed. Burn boxwas a bit high this morning-cleaning. AMAT Epi install moving along. Tylan 2 has a door close issue-checking it out. Everything else looks OK for now. Diffusion Mike,Ray, Ted Date: 7/25/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 yellow loader issue Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe down GEH4 tie in, tube pull completed 0/30 Tylan 9-Poly Up 17.91/30 Tylan 10-Nitride down checking 19.99/30 Tylan 11-BPSG-LTO Up 14.2/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi Up Burn Box Up cleaning this morning ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 100 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jul 26 06:24:52 2006 From: tberg at stanford.edu (Ted Berg) Date: Wed, 26 Jul 2006 06:24:52 -0700 Subject: Diffusion Morning Report 07/26/06 Message-ID: <44C76D24.6090708@stanford.edu> Good Morning All, Looking good this morning. SiGe shoulde be turned back on today after GeH4 tie in.Tylan 2 has temp problem. everything else looks OK for now. AMAT epi moving along S-l-o-w-l-y. Diffusion Mike,Ray, Ted Date: 7/26/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 uyellow p temp issues Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe down GEH4 tie in, tube pull completed 0/30 Tylan 9-Poly Up 17.99/30 Tylan 10-Nitride Up 20.4/30 Tylan 11-BPSG-LTO Up 14.953 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi Up Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 60 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jul 27 07:08:51 2006 From: tberg at stanford.edu (Ted Berg) Date: Thu, 27 Jul 2006 07:08:51 -0700 Subject: Diffusion Morning 07/27/06 Message-ID: <44C8C8F3.2070501@stanford.edu> Good Morning All, Looking good this morning.SiGe needs test after tie in. No other major problems at this time. AMAT Epi not moving too much. Diffusion Mike,Ray, Ted Date: 7/27/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe yellow needs test 0/30 Tylan 9-Poly Up 18.15/30 Tylan 10-Nitride Up 20.4/30 Tylan 11-BPSG-LTO Up 16/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi Up Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 60 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jul 28 06:47:58 2006 From: tberg at stanford.edu (Ted Berg) Date: Fri, 28 Jul 2006 06:47:58 -0700 Subject: Diffusion morning Report 07/28/06 Message-ID: <44CA158E.6010908@stanford.edu> Good Morning All, Looking good this morning. Still waiting for test results on SiGe. Burn box cleaned this morning. Everything else looks ok for now. Diffusion Mike,Ray, Ted Date: 7/28/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe yellow needs test 0/30 Tylan 9-Poly Up 18.55/30 Tylan 10-Nitride Up 20.58/30 Tylan 11-BPSG-LTO Up 16/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi Up Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces B on line 740 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jul 31 06:36:43 2006 From: tberg at stanford.edu (Ted Berg) Date: Mon, 31 Jul 2006 06:36:43 -0700 Subject: Diffusion Morning report 07/31/06 Message-ID: <44CE076B.3040304@stanford.edu> Good Morning All, Looking Good this morning . HCl for Epi switched over. AMAT Epi creeping Along. Everything else looks OK for now. Diffusion Mike,Ray, Ted Date: 7/31/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe yellow needs test 0/30 Tylan 9-Poly Up 19.22/30 Tylan 10-Nitride Up 20.59/30 Tylan 11-BPSG-LTO Up 23.19/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi Up HCl Switched over Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces B on line 740 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Mon Jul 31 07:12:45 2006 From: nanotech at nsti.org (Nano World News) Date: Mon, 31 Jul 2006 07:12:45 -0700 Subject: Nano World News July 2006 Message-ID: ******************************************************* *Note: If you are having trouble viewing this message,* *copy and paste the link below into your browser * *address field and hit the Enter button on your * *keyboard. * http://www.nsti.org/news/ *If you would like to unsubscribe, copy the URL below:* http://www.nsti.org/outreach/unsubscribe.html ******************************************************* --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: