diffusion morning Repost

Raymond Seymour seymour at snf.stanford.edu
Wed Jul 5 08:24:29 PDT 2006


Morning all,

Ted chose to play musical work days today, he did come in Monday, and will
be out tomorrow as well. My hottest issue this morning it Tylan1 and the
temp problems on tylan2.All else looking good after America's birthday bash
day.

 

 

 

 


Diffusion Mike, Ray, Ted

 

 

 

 

 


 

Date:

7/3/06

THICKNESS-Change at

 

 


Tube Name/Number

Status

Comments

 

 

 


Tylan 1

Down

flow issues

 

 

 


Tylan 2

Down

Temp control issues

 

 

 


Tylan 3

Up

 

 

 

 


Tylan 4

Up

 

 

 

 


Tylan 5-BBr3

Up

 

 

 

 


Tylan 6-POCl3

Up

 

 

 

 


Tylan 7-TEOS2

Up

 

1.8/30

 

 


Tylan 8-SiGe

Up

 

33.96/30

 

 


Tylan 9-Poly

Up

 

15.33/30

 

 


Tylan 10-Nitride

Up

 

10.13/30

 

 


Tylan 11-BPSG-LTO

yellow

 

30.54/30

 

 


Tylan 12-FGA

Up

 

 

 

 


 

 

 

 

 

 


Thermco 1

Up

 

 

 

 


Thermco 2

Up

 

 

 

 


Thermco Poly

Up

 

 

 

 


Thermco Nitride

Down

Testing

 

 

 


 

 

 

 

 

 


Epi

Up

 

 

 

 


 

 

 

 

 

 


Burn Box

Up

 

 

 

 


ZYGO

up

 

  

 

 


 

 

 

 

 

 


GAAS 22

UP

 

 

 

 


GAAS 23

up

 

 

 

 


 

 

 

 

 

 


SiH4 for furnaces

 

A on line 350 psi

 changeover working well 

 

 

 

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