Diffusion Morning Report

Raymond Seymour seymour at snf.stanford.edu
Thu Jul 6 08:47:56 PDT 2006


Morning All,

Started a clean on Tylan! last afternoon, Nancy monitored it and reported it
was ok. She will do a process test this morning. Tylan4 Hydrogen flow does
not match setp[oint and alarms. All else looking good.


 


Diffusion Mike, Ray, Ted

 

 

 

 

 


 

Date:

7/3/06

THICKNESS-Change at

 

 


Tube Name/Number

Status

Comments

 

 

 


Tylan 1

Down

Process testing

 

 

 


Tylan 2

Up

 

 

 

 


Tylan 3

Up

 

 

 

 


Tylan 4

Down

H2 MFS error

 

 

 


Tylan 5-BBr3

Up

 

 

 

 


Tylan 6-POCl3

Up

 

 

 

 


Tylan 7-TEOS2

Up

 

1.8/30

 

 


Tylan 8-SiGe

Up

 

33.96/30

 

 


Tylan 9-Poly

Up

 

15.33/30

 

 


Tylan 10-Nitride

Up

 

10.13/30

 

 


Tylan 11-BPSG-LTO

yellow

 

31.4/30

 

 


Tylan 12-FGA

Up

 

 

 

 


 

 

 

 

 

 


Thermco 1

Up

 

 

 

 


Thermco 2

Up

 

 

 

 


Thermco Poly

Up

 

 

 

 


Thermco Nitride

Down

Testing

 

 

 


 

 

 

 

 

 


Epi

Up

 

 

 

 


 

 

 

 

 

 


Burn Box

Up

 

 

 

 


ZYGO

up

 

  

 

 


 

 

 

 

 

 


GAAS 22

UP

 

 

 

 


GAAS 23

up

 

 

 

 


 

 

 

 

 

 


SiH4 for furnaces

 

A on line 340 psi

 changeover working well 

 

 

 

 

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