Diffusion morningreport

Raymond Seymour seymour at snf.stanford.edu
Tue Jul 11 08:12:50 PDT 2006


Morning All,

Ted is at Semicon today. TylanBPSG clean completed, needs test. Thermco Poly
gatevalve mounting bracket being modified and will go back together today.
All else looking pretty good.

 


Diffusion Mike, Ray, Ted

 

 

 

 

 


 

Date:

7/11/06

THICKNESS-Change at

 

 


Tube Name/Number

Status

Comments

 

 

 


Tylan 1

Up

 

 

 

 


Tylan 2

Up

 

 

 

 


Tylan 3

Up

 

 

 

 


Tylan 4

Up

 

 

 

 


Tylan 5-BBr3

Up

 

 

 

 


Tylan 6-POCl3

Up

 

 

 

 


Tylan 7-TEOS2

Up

 

1.8/30

 

 


Tylan 8-SiGe

Up

 

33.96/30

 

 


Tylan 9-Poly

Up

 

15.33/30

 

 


Tylan 10-Nitride

Up

 

15.97/30

 

 


Tylan 11-BPSG-LTO

Down

Needs test

0/30

 

 


Tylan 12-FGA

Up

 

 

 

 


 

 

 

 

 

 


Thermco 1

Up

 

 

 

 


Thermco 2

Up

 

 

 

 


Thermco Poly

Down

leak

 

 

 


Thermco Nitride

Down

Testing

 

 

 


 

 

 

 

 

 


Epi

Up

 

 

 

 


 

 

 

 

 

 


Burn Box

Up

 

 

 

 


ZYGO

up

 

  

 

 


 

 

 

 

 

 


GAAS 22

UP

 

 

 

 


GAAS 23

Up

 

 

 

 


 

 

 

 

 

 


SiH4 for furnaces

 

A on line 280 PSI psi

 

changeover working well 

 

 

 

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