Diffusion Morning Report 07/13/06

Ted Berg tberg at snf.stanford.edu
Thu Jul 13 06:29:22 PDT 2006


Good Morning All,
    Looking good this morning. Tylan 1 has a MFS alarm for N2 
flow-looking into it. Thermco Poly is back together and needs a test. 
AMAT Epi Startup is moving ahead.  Everything else looks OK for now.

Diffusion Mike,Ray, Ted 	  	  	  	  	 
  	Date: 	7/12/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	yellow 	MFS alarm N2 	  	  	 
Tylan 2 	Up 	  	  	  	 
Tylan 3 	Up 	  	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	Up 	  	1.8/30 	  	 
Tylan 8-SiGe 	Up 	  	33.96/30 	  	 
Tylan 9-Poly 	Up 	  	15.93/30 	  	 
Tylan 10-Nitride 	Up 	  	16.16/30 	  	 
Tylan 11-BPSG-LTO 	Up 	  	.95/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Down 	needs test 	  	  	 
Thermco Nitride 	Down 	Testing 	  	  	 
  	  	  	  	  	 
Epi 	Up 	  	  	  	 
  	  	  	  	  	 
Burn Box 	Up 	  	  	  	 
ZYGO 	up 	  	   	  	 
  	  	  	  	  	 
GAAS 22 	UP 	  	  	  	 
GAAS 23 	up 	  	  	  	 
  	  	  	  	  	 
SiH4 for furnaces 	  	A on line 280 psi 	 changeover working well  	  	 


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