Diffusion Morning Report 07/14/06

Ted Berg tberg at snf.stanford.edu
Fri Jul 14 06:35:34 PDT 2006


Good Morning All,
    Looking Good this morning. No major problems at this time. GeH4 
shutdown will begin next week and will be down for about 2
weeks hopefully. Burnbox cleaned this morning. No Other issues at this 
time. AMAT epi install moving forward.

Diffusion Mike,Ray, Ted 	  	  	  	  	 
  	Date: 	7/14/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	Up 	  	  	  	 
Tylan 2 	Up 	  	  	  	 
Tylan 3 	Up 	  	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	Up 	  	1.8/30 	  	 
Tylan 8-SiGe 	Up 	  	33.96/30 	  	 
Tylan 9-Poly 	Up 	  	15.93/30 	  	 
Tylan 10-Nitride 	Up 	  	16.16/30 	  	 
Tylan 11-BPSG-LTO 	Up 	  	4.3/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	Running Fine 	  	  	 
Thermco Nitride 	Down 	Testing 	  	  	 
  	  	  	  	  	 
Epi 	Up 	  	  	  	 
  	  	  	  	  	 
Burn Box 	Up 	cleaned this morning 	  	  	 
ZYGO 	up 	  	   	  	 
  	  	  	  	  	 
GAAS 22 	UP 	  	  	  	 
GAAS 23 	up 	  	  	  	 
  	  	  	  	  	 
SiH4 for furnaces 	  	A on line 260 psi 	 changeover working well  	  	 


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