Diffusion Morning Report 07/17/06

Ted Berg tberg at snf.stanford.edu
Mon Jul 17 06:34:00 PDT 2006


Good Morning All,
    Looking OK this morning. Poly, Tylan2,Epi are down -checking them 
out. Germane for Tylan will be going down today for tie in.
AMAT epi is moving along.  Everything else looks OK for now,

Diffusion Mike,Ray, Ted 	  	  	  	  	 
  	Date: 	7/117/2006 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	Up 	  	  	  	 
Tylan 2 	Down 	H2/O2 alarm 	  	  	 
Tylan 3 	Up 	  	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	Up 	  	1.8/30 	  	 
Tylan 8-SiGe 	Up 	  	33.96/30 	  	 
Tylan 9-Poly 	Down 	leak 	16.12/30 	  	 
Tylan 10-Nitride 	Up 	  	17.17/30 	  	 
Tylan 11-BPSG-LTO 	Up 	  	6.88/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	Running Fine 	  	  	 
Thermco Nitride 	Down 	Testing 	  	  	 
  	  	  	  	  	 
Epi 	down 	facilities red light 	  	  	 
  	  	  	  	  	 
Burn Box 	Up 	  	  	  	 
ZYGO 	up 	  	   	  	 
  	  	  	  	  	 
GAAS 22 	UP 	  	  	  	 
GAAS 23 	up 	  	  	  	 
  	  	  	  	  	 
SiH4 for furnaces 	  	A on line 260 psi 	 changeover working well  	  	 


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