Diffusion Morning 07/27/06

Ted Berg tberg at stanford.edu
Thu Jul 27 07:08:51 PDT 2006


Good Morning All,
    Looking good this morning.SiGe needs test after tie in.  No other 
major problems at this time. AMAT Epi not moving too much.
Diffusion Mike,Ray, Ted 	  	  	  	  	 
  	Date: 	7/27/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	Up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	Up 	  	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	Up 	  	1.8/30 	  	 
Tylan 8-SiGe 	yellow  	needs test 	0/30 	  	 
Tylan 9-Poly 	Up 	  	18.15/30 	  	 
Tylan 10-Nitride 	Up 	  	20.4/30 	  	 
Tylan 11-BPSG-LTO 	Up 	  	16/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	  	  	  	 
Thermco Nitride 	Down 	Testing 	  	  	 
  	  	  	  	  	 
Epi 	Up 	  	  	  	 
  	  	  	  	  	 
Burn Box 	Up 	  	  	  	 
ZYGO 	up 	  	   	  	 
  	  	  	  	  	 
GAAS 22 	UP 	  	  	  	 
GAAS 23 	up 	  	  	  	 
  	  	  	  	  	 
SiH4 for furnaces 	  	A on line 60 psi 	 changeover working well  	  	 


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