Diffusion Morning report 07/31/06

Ted Berg tberg at stanford.edu
Mon Jul 31 06:36:43 PDT 2006


Good Morning All,
    Looking Good this morning . HCl for Epi switched over. AMAT Epi 
creeping Along. Everything else looks OK for now.

Diffusion Mike,Ray, Ted 	  	  	  	  	 
  	Date: 	7/31/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	Up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	Up 	  	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	Up 	  	1.8/30 	  	 
Tylan 8-SiGe 	yellow  	needs test 	0/30 	  	 
Tylan 9-Poly 	Up 	  	19.22/30 	  	 
Tylan 10-Nitride 	Up 	  	20.59/30 	  	 
Tylan 11-BPSG-LTO 	Up 	  	23.19/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	  	  	  	 
Thermco Nitride 	Up 	  	  	  	 
  	  	  	  	  	 
Epi 	Up 	HCl Switched over 	  	  	 
  	  	  	  	  	 
Burn Box 	Up 	  	  	  	 
ZYGO 	up 	  	   	  	 
  	  	  	  	  	 
GAAS 22 	UP 	  	  	  	 
GAAS 23 	up 	  	  	  	 
  	  	  	  	  	 
SiH4 for furnaces 	  	B on line 740 psi 	 changeover working well  	  	 


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20060731/12a3241f/attachment.html>


More information about the diffusion mailing list