From tberg at snf.stanford.edu Thu Jun 1 07:04:14 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 01 Jun 2006 07:04:14 -0700 Subject: Diffusion Morning Report 06/01/06 Message-ID: <447EF3DE.9090200@snf.stanford.edu> Good Morning All, Looking OK this morning. Not sure about Nitride test. TEOS2 tubes out for repair. Possibly no PH3 onTHermco Poly-checking.. Everything else looks ok for now. Diffusion Mike,Ray, Ted Date: 6/1/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down tubes out for repair 0/30 Tylan 8-SiGe Up Log not updated 30.17/30 Tylan 9-Poly Up 9.74/30 Tylan 10-Nitride Down DCS flow issues 3.42/30 Tylan 11-BPSG-LTO yellow poor uniformity 8.06+/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly yellow no ph3 flow? Thermco Nitride Down Testing Epi yellow possible higher leak rate Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 500 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jun 2 06:47:38 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 02 Jun 2006 06:47:38 -0700 Subject: Diffusion Morning Report 06/02/06 Message-ID: <4480417A.5030500@snf.stanford.edu> Good Morning All, Looking ok this morning. Still addressing TEOS and Nitride issues. Burn box clean this morning. Pulled monster wires for new Epi yesterday-thanks Mike and Ray. Everything else looks OK for now. From tberg at snf.stanford.edu Fri Jun 2 07:25:13 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 02 Jun 2006 07:25:13 -0700 Subject: [Fwd: Diffusion Morning Report 06/02/06] Message-ID: <44804A49.20207@snf.stanford.edu> -------- Original Message -------- Subject: Diffusion Morning Report 06/02/06 Date: Fri, 02 Jun 2006 06:47:38 -0700 From: Ted Berg To: Dick Crane , diffusion , Ed Myers , tberg , Mary Tang , "maurice at snf.stanford.edu" , "mdickey at snf.stanford.edu" , Nancy Latta , Paul Rissman , Ray Seymour Good Morning All, Looking ok this morning. Still addressing TEOS and Nitride issues. Burn box clean this morning. Pulled monster wires for new Epi yesterday-thanks Mike and Ray. Everything else looks OK for now. Diffusion Mike,Ray, Ted Date: 6/2/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 yellow boat issues Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down tubes out for repair 0/30 Tylan 8-SiGe Up 30.17/30 Tylan 9-Poly Up 9.89/30 Tylan 10-Nitride Down changing mfc 3.42/30 Tylan 11-BPSG-LTO yellow poor uniformity 13.3/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi yellow possible higher leak rate Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 470 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From wuxinhua369 at vip.sina.com Fri Jun 2 19:48:55 2006 From: wuxinhua369 at vip.sina.com (wuxinhua369 at vip.sina.com) Date: Sat, 3 Jun 2006 10:48:55 +0800 Subject: =?gb2312?B?SU1QVURFTlQsIFNDT1VORFJFTCwgRHVQb250IG9mIHRoZSBVbml0ZWQgU3RhdGVzIc7es9yjrM7ewLWjrMPAufq2xbDuus262MD7tcMh?= Message-ID: <20060603AMv93HEA2.lGHPBeTDi> A non-text attachment was scrubbed... Name: not available Type: multipart/alternative Size: 41682 bytes Desc: not available URL: From tberg at snf.stanford.edu Mon Jun 5 07:04:06 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 05 Jun 2006 07:04:06 -0700 Subject: Diffusion Morning Report 06/05/06 Message-ID: <448439D6.8070102@snf.stanford.edu> Good Morning All, Looking good this morning. TEOS is back together and ready for a test. DCS seems to flow throughout the entire test-but now NH3 may have a problem. Tylan 2 has too good growth rate. AMAT Epi is moving Ahead. Everything else looks OK for now. Diffusion Mike,Ray, Ted Date: 6/5/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Growth rate too good?? Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down needs test 0/30 Tylan 8-SiGe Up 30.17/30 Tylan 9-Poly Up 9.89/30 Tylan 10-Nitride Down nh3 issues? 3.42/30 Tylan 11-BPSG-LTO yellow poor uniformity 16.34/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi yellow possible higher leak rate Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 470 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jun 6 06:42:14 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 06 Jun 2006 06:42:14 -0700 Subject: Diffusion Morning Report 06/06/06 Message-ID: <44858636.7060004@snf.stanford.edu> Good Morning All, Looking good this morning. TEOS was back up but had an abort for some reason-checking it out. Polyfailed leak check-looking into it. Epi might have a lamp out. Everything else looks ok for now. AMAT epi moving along. Diffusion Mike,Ray, Ted Date: 6/5/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow aborted 0/30 Tylan 8-SiGe Up 30.17/30 Tylan 9-Poly Up 10.39/30 Tylan 10-Nitride yellow 3.7/30 Tylan 11-BPSG-LTO yellow poor uniformity 16.53/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi yellow possible higher leak rate Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 470 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jun 7 06:36:03 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 07 Jun 2006 06:36:03 -0700 Subject: Diffusion Morning Report 06/07/06 Message-ID: <4486D643.2020002@snf.stanford.edu> Good Morning All, Looking kind of grim this morning. All of the Tylan LPs are because of the high burn box pressure-cleaning this morning. The Tylan oxides are all down because they are growing too fast. The stuff that is left seems to be OK for now. AMAT epi moving ahead. Diffusion Mike,Ray, Ted Date: 6/7/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Down High growth Tylan 2 Down Broken Sheath Tylan 3 Down High growth Tylan 4 Down High growth Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 orange Burn box high pressure 0/30 Tylan 8-SiGe orange 30.17/30 Tylan 9-Poly orange 10.39/30 Tylan 10-Nitride orange 3.7/30 Tylan 11-BPSG-LTO orange poor uniformity 18.16/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi yellow possible higher leak rate Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 470 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jun 8 07:11:06 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 08 Jun 2006 07:11:06 -0700 Subject: Diffusion Morning Report 06/08/06 Message-ID: <44882FFA.7040107@snf.stanford.edu> Good Morning All, Looking good this morning. Thick Oxide issues resolved(it wasn't the furnaces fault). Looking into Poly pump issues. Nitride RI issues still pending. Crossed over HCl cylinders. AMAT epi now has power connected. Everything else looks OK for now. Diffusion Mike,Ray, Ted Date: 6/8/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 yellow possible higher dep Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow Burn box high pressure .2/30 Tylan 8-SiGe Up 30.17/30 Tylan 9-Poly yellow Intermittantly goes out of pump prog 10.55/30 Tylan 10-Nitride yellow RI issues 3.7/30 Tylan 11-BPSG-LTO yellow poor uniformity? 18.56/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi yellow possible higher leak rate Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 440 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jun 9 07:19:00 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 09 Jun 2006 07:19:00 -0700 Subject: Diffusion Morning Report 06/09/06 Message-ID: <44898354.6070201@snf.stanford.edu> Good Morning All, Looking good this morning. Burn box clean was off to a late start because a user went over. Nitride RI still an issue. Everything else looks OK for now. Diffusion Mike,Ray, Ted Date: 6/9/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow .2/30 Tylan 8-SiGe Up 30.17/30 Tylan 9-Poly yellow 11.22/30 Tylan 10-Nitride yellow RI issues 3.7/30 Tylan 11-BPSG-LTO yellow poor uniformity? 19.25/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi yellow possible higher leak rate Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 440 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From hebangdian at 21cn.com Sat Jun 10 18:01:12 2006 From: hebangdian at 21cn.com (hebangdian) Date: Sun, 11 Jun 2006 09:01:12 +0800 Subject: IMPUDENT, SCOUNDREL, DuPont of the United =?GB2312?B?U3RhdGVzIc7es9yjrM7ewLWjrMPAufq2xbDuus262MD7tcMh?= Message-ID: IMPUDENT, SCOUNDREL, DuPont of the United States!??????????????! An open letter to American President Mr. Bush ?????????????? Explanation: Du Pont Chemical Company of the United State(in 2005 year )has for several times required to submit the dispute between it and our side to an arbitration organization. Respecting the requirement of Du Pont, we sent a version of ?Arbitration Agreement? in a registered letter to Du Pont on January 16, 2006, with an enclosure saying if Du Pont raises no objections, we will appreciate it if Du Pont sign and affix its seal to the agreement and mail the rest two copies back to us in 30 days. If Du Pont has objections, it may produce a version of its own. Meanwhile, we have sent the ?Arbitration Agreement? and an enclosure letter by e-mail to info.china at chn.dupont.com and info at dupont.com 24 times on January 26, February 6, February 10 and February 15, 2006 respectively. Now more than 30 days have passed, far exceeding the time that needs for finding proof and making a decision, and we have received no reply. This is most likely another trick played by Du Pont for the purpose of repudiating its debt. We therefore send this e-mail and ask for your pardon if it does any convenience to you. If possible, we request you tell Du Pont not to play this kind of trick any more. (As many people with the public relations department of the Du Pont Chemical Company excel at Chinese, the registered letter and e-mail we have sent are not translated into English.) IMPUDENT, SCOUNDREL, DuPont of the United States!??????????????! IMPUDENT, SCOUNDREL, CEO of DuPont Holliday ! DuPont Co. and its CEO Holliday are transnational scoundrel! Without open objection, DuPont is openly admitting itself to be a transnational scoundrel! We firmly believe that the United State is not a country that shields and connives at rascals and the American government is not a government that shields and connives at rascals! We request the American government actions to intensify the law enforcement strength to protect intellectual property rights,force transnational scoundrel DuPont to carry out it?s voluntarily promised obligations in the agreement. ************************************************************************************************* Hello, my respectable President Mr. Bush: The fact that DuPont declined to fulfill the agreement has been presented to you for several times via president at whitehouse.gov; As a result, president at whitehouse.gov sent back three letters containing the following same contents on the behalf of Mr. President in Sep 2004:?Thank you for e-mailing President Bush. Your ideas and comments are very important to him.? My ?ideas and comments? are as follows: it is verified by Mr. Huang with adequate facts and irrefutable legal evidences that DuPont must disburse Mr. Huang patent fee, license fee or equivalent ?Utter Compensation? fee and DuPont?s persistent refusal to disburse these fees infringes upon the intellectual property rights of Mr. Huang. president at whitehouse.gov mentioned ?are very important to him.? I don?t dare to unduly surmise the meaning of ?very important? to Mr. President; However, according to my humble opinions, there exits the following ?important?: on the one hand, respectable Mr. President, the American Government led by Mr. President as well as the great American people bitterly hate the predation of the intellectual property rights of others through brazen means such as stealing, shameless acts; in contrast, DuPont is committing such brazen and shameless deals; on the other hand, the number of your country?s intellectual property rights in a variety of fields is far in excess of that of any nations in the world and suffers greatly from rights infringement. Therefore, your government always reserves no efforts in urging other nations to intensify the law enforcement strength to protect your country?s intellectual property rights. However, while your government reserves no efforts in urging the Chinese government to intensify the law enforcement strength to protect your country?s intellectual property rights and receives your ?more encouraged? praise, DuPont is infringing the intellectual property rights of Mr. Huang through various extremely brazen and shameless means, which constitutes an extremely bad signal to the governments and public of other nations in the world, a extremely ?good? model for current and potential thieves of intellectual property rights, SETTING Dupont AS AN EXAMPLE, COMPANIES AND PUBLIC OF OTHER COUNTRIES IN THE WORLD WILL MISAPPREHEND THAT THEY TOTALLY HAVE THE RIGHT TO INFRINGE THE INTELLECTUAL PROPERTY OF YOUR COUNTRY WITHOUT ANY FEAR, SUCH AS FAKE VIDEO PRODUCTS AND BRANDS,PLAGIARIZE PATENT,an enormous damage to your government protection of your country?s intellectual property rights, and a tremendous humiliation to your country?s lofty status in the world. For the sake of the glory of the great American people and the reputation of a legion of American corporations, in order to safeguard your country?s lofty status in the world and protect the intellectual property rights of your country and other nations in the world, we humbly request you and your government to prevent DuPont?s such extremely brazen infringement and even seizure behaviors, and force DuPont to carry out it?s voluntarily promised obligations in the agreement. We firmly believe that the United State is not a country that shields and connives at rascals and the American government is not a government that shields and connives at rascals; Under the instruction of our respectable Mr. President and the American government, the rascal of DuPont shall be aware of shame and be able to turn into a normal corporation by giving up shameless behaviors. Due to the adequate evidences, the clear-cut rights and obligations of both parties of DuPont and Mr. Huang, and simple legal relations, the infringement of the intellectual property rights of Mr. Huang by DuPont can be absolutely prevented and DuPont will surely disburse Mr. Huang patent fee, license fee or equivalent ?Utter Compensation? fee as long as your government intensifies the law enforcement strength to protect intellectual property rights as well. With best regards! Annex: Heartfelt thanks for your reading my E-mail and your mail of attention to this matter. I would like to make some replenishment concerning the matter, for you to judge and decide. I Abstract 1. At the request of Du Pont, Mr. Huang has for 10 times submitted written technical materials to Du Pont from April 1993 to 1994, for expert group of Du Pont to conduct feasibility analysis. 2. On February 22, 1995, Dr Robert F Sklar, Technology Transfer Licensing Manager of DuPont arrived in Shanghai in China, to ?sign many agreements? with Mr. Huang. Mr. Huang insisted DuPont examines samples first before signs any agreement. However, as samples were still in the process of purification at the time, no agreements were signed then. 3. On March 28, 1995, Mr. Huang sent the first batch of samples to Du Pont by post. 4. On September 7, 1995, Mr. Huang received ?Biological Evaluation Agreement? (1995 Agreement) sent by Du Pont, requiring Mr. Huang to sign this agreement and again provide samples. Mr. Huang signed the agreement and sent second batch of samples as requested by DuPont. DuPont admit in Article 5 of the ?1995 Agreement? that Mr. Huang will be entitled to claim patent and licensing fees. DuPont states in Article 8 of the ?1995 Agreement? that Mr. Huang may not cooperate with any universities or enterprises in any form before and after signing of this agreement (for this reason, Mr. Huang has refused cooperation request of several companies). 5. On September 10, 1998, DuPont sent a letter to Mr. Huang, asking for third batch of samples. 6. In 1999, DuPont carried out a month-long insecticide screening on the third batch of samples (in fact, it has carried out weeds killing test and mould killing test in the meantime), and required to keep all these tests a secret. 7. On June 8, 2000, DuPont sent a letter saying it was not interested in samples provided by Mr. Huang, and refused to pay Mr. Huang patent and licensing fees. 8.The mail signed by DuPont on June 2th, 2005, threaten Mr.Huang ,and prevent Mr.Huang send the E-mail. Seek response from E-mail: info at dupont.com http://www1.dupont.com/NASApp/dupontglobal/corp/contactEmail.jsp info.china at chn.dupont.com ?????????????? ??? ?????????????2005??????????????????????????????????????2006.01.16.?????????????????????????????????????30????????????????????????????????????????2006.01.26.,2006.02.06.?2006.02.10.?2006.02.15.????????????24?????info.china at chn.dupont.com?info at dupont.com??????????30???????????????????????????????????????????????????????e-mail?????????????????????????????????????????? ??????????! ???????????????! ?????????????????????! ??????????,???????????????????????! ????????????????????????????????????????? ???????????????????????????????????????? ************************************************************************************************* ????????????? ?????????????????president at whitehouse.gov?????president at whitehouse.gov?? 2004?9??????????????????????Thank you for e-mailing President Bush. Your ideas and comments are very important to him.????ideas and comments????????????????????????????????????????????????????????????????????????????????president at whitehouse.gov??are very important to him.? ?very important??????????????????????????????important? ? 1.????????????????????????????????????????????????????????????????????????? 2.???????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????,????????????????????,????????????????????????????????????????????? ???????????????????????????????????????????????? ???????????????????????????????????????????????? ????????? ???????????????????????????????????????????????? ????????????????????????????????????????????? ???????????????????????????????????????????????? ??????????????????????????????????????????????????????????????????? ?? ??????? ?????? Chinese SXF 2005.09.17.23?59 ?? 1. ?1993?4???1994??????????????????10???????????????? ?????? 2. 1995?2?22?????????????Sklar?? ?E.I.DU PONT DE NEMOURS AND COMPANY Robert F. Sklar Ph. D. Manager,Technology Transfer Licensing)??????????????????????????????????????????????????????????? 3 1995?3?28???????????????? 4. 1995?9?7????????????BIOLOGICAL EVALUATION AGREEMENT?1995???)?????????????????????????????????????????????????1995?????5??????????????????????????????????1995?????8?????????????????????????????????????????? ???? 5. 1998?9?10?????????????????? 6 1999????????????????Insecticide Screening??????????????????????????????????????? 7. 2000?6?8?????????????????,????????????????? 8.2005.06.02. ???????????????-??????????E-mail? (??E-mail????? info.china at chn.dupont.com , ????Contact Us:info at dupont.com http://www1.dupont.com/NASApp/dupontglobal/corp/contactEmail.jsp) ?????????/???????????? ************************************************************************************************* ?????????????????????????????????????!??!!????!!! ?????????????,?????????????????????! *???,????* *????????????????????????????!!!!!!!!!!!!!!!!!??????... **???,??!???,??! *?????????????????????????????????????! * ???????????????????????????????????????????????????????????????! ************************************************************************************************* From tberg at snf.stanford.edu Mon Jun 12 06:35:45 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 12 Jun 2006 06:35:45 -0700 Subject: Diffusion Morning Report 06/12/06 Message-ID: <448D6DB1.6010606@snf.stanford.edu> Good Morning All, Looking Good this morning. Nitride may have RI issues. LTO possible Uniformity issues. Tylan 2 had a display issue-resolved. Everything else looks OK for now. Amat Epi install moving ahead. Diffusion Mike,Ray, Ted Date: 6/12/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow 6.0/30 Tylan 8-SiGe Up 30.17/30 Tylan 9-Poly yellow 11.57/30 Tylan 10-Nitride yellow RI issues 4.71/30 Tylan 11-BPSG-LTO yellow poor uniformity? 19.9/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi yellow possible higher leak rate Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 425 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jun 13 06:27:22 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 13 Jun 2006 06:27:22 -0700 Subject: Diffusion Morning Report 06/13/06 Message-ID: <448EBD3A.6080200@snf.stanford.edu> Good Morning All, Looking good this morning. Tylan 3 has some temp issues-investigating. Burn box had high pressure when TEOS was running- it is at -1 this morning. SEM hitachi has pumping issues-looking into it. Everything else looks OK for now. Diffusion Mike,Ray, Ted Date: 6/13/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Down temp issues Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow 6.75/30 Tylan 8-SiGe Up 30.17/30 Tylan 9-Poly yellow 11.57/30 Tylan 10-Nitride yellow RI issues 4.88/30 Tylan 11-BPSG-LTO yellow poor uniformity? 20.43 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi yellow possible higher leak rate Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 420 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jun 14 07:21:05 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 14 Jun 2006 07:21:05 -0700 Subject: Diffusion Morning Report 06/14/06 Message-ID: <44901B51.6030405@snf.stanford.edu> Good Morning All, Looking good this morning. TEOS has particle problems-looking into it.. Everything else looks OK for now. Diffusion Mike,Ray, Ted Date: 6/14/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up tc replaced Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow 8.0/30 Tylan 8-SiGe Up 30.17/30 Tylan 9-Poly yellow 11.57/30 Tylan 10-Nitride yellow RI issues 4.88/30 Tylan 11-BPSG-LTO yellow poor uniformity? 20.43/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi yellow possible higher leak rate Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 420 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jun 15 06:38:17 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 15 Jun 2006 06:38:17 -0700 Subject: Diffusion Morning report 06/15/06 Message-ID: <449162C9.3050307@snf.stanford.edu> Good Morning All, Looking good this morning. No new problems. AMAT epi is moving along. Diffusion Mike,Ray, Ted Date: 6/15/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow 8.0/30 Tylan 8-SiGe Up 30.17/30 Tylan 9-Poly yellow 11.84/30 Tylan 10-Nitride yellow RI issues 4.88/30 Tylan 11-BPSG-LTO yellow poor uniformity? 20.47/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi yellow possible higher leak rate Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 410 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jun 16 06:20:28 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 16 Jun 2006 06:20:28 -0700 Subject: Diffusion Morning Report 06/16/06 Message-ID: <4492B01C.40708@snf.stanford.edu> Good Morning All, Looking OK this morning. TEOS is back up after source change. Burn box cleaned this morning. Everything else looks ok for now. Diffusion Mike,Ray, Ted Date: 6/16/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow 8.0/30 Tylan 8-SiGe Up 30.17/30 Tylan 9-Poly yellow 11.84/30 Tylan 10-Nitride yellow RI issues 4.88/30 Tylan 11-BPSG-LTO yellow poor uniformity? 20.72/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi yellow possible higher leak rate Burn Box Up Cleaned this morning ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 410 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Jun 19 06:34:06 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 19 Jun 2006 06:34:06 -0700 Subject: Diffusion Morning Report 06/19/06 Message-ID: <4496A7CE.5020709@snf.stanford.edu> Good morning All, Looking good this morning. Epi's pump was off this morning-looking into it. House N2 gasket replacement this morning. No other major problems at this time. Diffusion Mike,Ray, Ted Date: 6/19/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow 9.65/30 Tylan 8-SiGe Up 30.17/30 Tylan 9-Poly yellow 12.04/30 Tylan 10-Nitride yellow RI issues 4.91/30 Tylan 11-BPSG-LTO yellow poor uniformity? 21.22/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi down pump off Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 400 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jun 20 06:30:54 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 20 Jun 2006 06:30:54 -0700 Subject: Diffusion Morning Report 06/20/06 Message-ID: <4497F88E.5010106@snf.stanford.edu> Good morning All, Looking OK this morning. A few issues-Epi is down for high base pressure and leak rate after looing N2 yesterday. LTO has brown stuff on cantilever. Still some questions about NitrideRI and LTO uniformity. No other issues at this time. Date: 6/20/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow 9.65/30 Tylan 8-SiGe Up 30.17/30 Tylan 9-Poly yellow 12.2/30 Tylan 10-Nitride yellow RI issues 4.91/30 Tylan 11-BPSG-LTO yellow Crud on Cantilever 21.22/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi down high base Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 400 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jun 21 06:45:48 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 21 Jun 2006 06:45:48 -0700 Subject: Diffusion Morning Report 06/21/06 Message-ID: <44994D8C.9010904@snf.stanford.edu> Good Morning All, Looking OK this morning.Teos has pressure control issues. No other major problems at this time. Diffusion Mike,Ray, Ted Date: 6/21/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow high pressure 10.53/30 Tylan 8-SiGe Up 30.17/30 Tylan 9-Poly yellow 12.36/30 Tylan 10-Nitride yellow RI issues 5.01/30 Tylan 11-BPSG-LTO yellow 21.52/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi down possible high base Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 400 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jun 22 07:13:11 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 22 Jun 2006 07:13:11 -0700 Subject: Diffusion Morning Report 06/22/06 Message-ID: <449AA577.5080600@snf.stanford.edu> Good Morning All, Looking OK this morning. Tylan one has a bad fitting on the torch-replacing. Tylan6 has temp issues-doing cal. TEOS ran for 1.5 hours then pressure went too high. Waiting for RI results on Nitride after checkout. Everything else looks OK for now. Diffusion Mike,Ray, Ted Date: 6/22/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 down torch fitting replacement Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 down temp issues Tylan 7-TEOS2 yellow high pressure 10.53/30 Tylan 8-SiGe Up 30.17/30 Tylan 9-Poly yellow 12.36/30 Tylan 10-Nitride yellow RI issues ? 5.01/30 Tylan 11-BPSG-LTO yellow 21.52/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi Up Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 400 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Fri Jun 23 07:46:45 2006 From: seymour at snf.stanford.edu (Raymond Seymour) Date: Fri, 23 Jun 2006 07:46:45 -0700 Subject: Diffusion Morning Report Message-ID: <008101c696d3$d9b6a790$9a6540ab@bigvtwin> Good Morning All, Ted is out today. Epi burnbox is down due to flooding the element area and will need to be disassembled for checkout. The LPCVD burnbox was cleaned this morning. All else is looking good. Diffusion Mike, Ray, Ted Date: 6/23/06 THICKNESSChange at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 yellow high pressure 10.53/30 Tylan 8-SiGe Up 33.04/30 Tylan 9-Poly yellow 12.73/30 Tylan 10-Nitride yellow RI issues 8.63/30 Tylan 11-BPSG-LTO yellow 21.73/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi down Burnbox issues Burn Box Up Cleaned this morning ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 400 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Mon Jun 26 07:36:34 2006 From: seymour at snf.stanford.edu (Raymond Seymour) Date: Mon, 26 Jun 2006 07:36:34 -0700 Subject: Diffusion Morning Report Message-ID: <000701c6992d$eceb4ee0$9a6540ab@bigvtwin> Morning All, We are looking pretty good this morning. Epi Burnbox came up Friday afternoon. TEOS is down for tube clean. STS PECVD Silane/Nitrogen cylinder being changed this morning. All else looking pretty good, so far. Date: 6/26/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Down Tube clean 0/30 Tylan 8-SiGe Yellow 33.48/30 Tylan 9-Poly Up 12.73/30 Tylan 10-Nitride Up 7.95/30 Tylan 11-BPSG-LTO Up 23.0330 Tylan 12-FGA Up Thermco 1 yellow Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces A on line 400 changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Jun 27 06:57:10 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 27 Jun 2006 06:57:10 -0700 Subject: Diffusion Morning Report 06/27/06 Message-ID: <44A13936.2050507@snf.stanford.edu> Good Morning All, Looking good this morning. No major problems in diffusion. Amat install is moving ahead. Diffusion Mike,Ray, Ted Date: 6/27/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 0/30 Tylan 8-SiGe Up 33.96/30 Tylan 9-Poly Up 12.89/30 Tylan 10-Nitride Up 9.95/30 Tylan 11-BPSG-LTO yellow 23.05/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi Up Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 390 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Jun 28 06:25:09 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 28 Jun 2006 06:25:09 -0700 Subject: Diffusion Morning Report 06/28/06 Message-ID: <44A28335.6040604@snf.stanford.edu> Good Morning All, Looking Good this morning. No Major problems at this time. Diffusion Mike,Ray, Ted Date: 6/28/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe Up 33.96/30 Tylan 9-Poly Up 13.23/30 Tylan 10-Nitride Up 9.95/30 Tylan 11-BPSG-LTO yellow 24.67/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi Up Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 390 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Wed Jun 28 10:04:14 2006 From: nanotech at nsti.org (Nano World News) Date: Wed, 28 Jun 2006 10:04:14 -0700 Subject: Nano World News May-June 2006 Message-ID: An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Jun 29 06:28:20 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 29 Jun 2006 06:28:20 -0700 Subject: Diffusion Morning Report 06/29/06 Message-ID: <44A3D574.6080200@snf.stanford.edu> Good Morning All, Looking good this morning. Tylan 1 is down, no N2 carrierflow and melted fitting on rear. SEM Hitachi is down due to broken coupler onRotation. Everything else is OK for now. Diffusion Mike,Ray, Ted Date: 6/28/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Down Rear fitting melted Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe Up 33.96/30 Tylan 9-Poly Up 13.23/30 Tylan 10-Nitride Up 9.95/30 Tylan 11-BPSG-LTO yellow 24.67/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi Up Burn Box Up ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 380 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jun 30 06:25:34 2006 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 30 Jun 2006 06:25:34 -0700 Subject: Diffusion Morning Report 06/30/06 Message-ID: <44A5264E.3050102@snf.stanford.edu> Good morning All, Looking good this morning. Tylan 1 is back together and needs checkout. Hitachi is in fine tuning ebeam. AMAT is working on new epi startup. Germane tie in for Thermcos sould start in abot 2 weeks. SEM Hitachi is back up after a fine fix by Ted-Thanks. Burn box cleaned this morning. Everything else looks OK for now. Diffusion Mike,Ray, Ted Date: 6/3028/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Down needs test Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 1.8/30 Tylan 8-SiGe Up 33.96/30 Tylan 9-Poly Up 13.38/30 Tylan 10-Nitride Up 9.95/30 Tylan 11-BPSG-LTO yellow 24.67/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Down Testing Epi Up Burn Box Up Cleaned this morning ZYGO up GAAS 22 UP GAAS 23 up SiH4 for furnaces A on line 380 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... 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