Diffusion Morning Report 05/01/06

Ted Berg tberg at snf.stanford.edu
Mon May 1 06:39:42 PDT 2006


Good Morning All,
    Looking good this morning. No major problem this morning. AMAT epi 
install is moving along well. SiGe Poly in Thermco bank 2 is
moving along OK. 

> Diffusion 	  	  	  	  	 
>   	Date: 	5/1/06 	THICKNESS-Change at 	  	 
> Tube Name/Number 	Status 	Comments 	  	  	 
> Tylan 1 	Up 	  	  	  	 
> Tylan 2 	Up 	  	  	  	 
> Tylan 3 	Up 	  	  	  	 
> Tylan 4 	Up 	  	  	  	 
> Tylan 5-BBr3 	Up 	  	  	  	 
> Tylan 6-POCl3 	Up 	  	  	  	 
> Tylan 7-TEOS2 	Up 	  	20.43/30 	  	 
> Tylan 8-SiGe 	Up 	  	29.39/30 	  	 
> Tylan 9-Poly 	Up 	  	2.55/30 	  	 
> Tylan 10-Nitride 	Up 	  	23.46/30 	  	 
> Tylan 11-BPSG-LTO 	up 	  	3.74/30 	  	 
> Tylan 12-FGA 	Up 	  	  	  	 
>   	  	  	  	  	 
> Thermco 1 	Up 	  	  	  	 
> Thermco 2 	Up 	  	  	  	 
> Thermco Poly 	Up 	  	  	  	 
> Thermco Nitride 	Down 	Testing 	  	  	 
>   	  	  	  	  	 
> Epi 	yellow 	possible higher leak rate 	  	  	 
>   	  	  	  	  	 
> Burn Box 	Up 	  	  	  	 
> ZYGO 	up 	  	   	  	 
>   	  	  	  	  	 
> GAAS 22 	UP 	  	  	  	 
> GAAS 23 	up 	  	  	  	 
>   	  	  	  	  	 
> SiH4 for furnaces 	  	A on line 590 psi 	 changeover working well  	  	 
>

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