Diffusion Morning Report 05/04/06
tberg at snf.stanford.edu
Thu May 4 07:13:38 PDT 2006
Good Morning All,
Looking good this morning. LTO had a broken boat that was replaced.
Tylan 3 has bad uniformity-cantilever is being rebuilt.
TEOS pump out for Repair. Everything else looks OK for now.
Date: 5/4/06 THICKNESS-Change at
Tube Name/Number Status Comments
Tylan 1 Up
Tylan 2 Up
Tylan 3 yellow bad uniformity
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-TEOS2 Down Pump out for repair 20.43/30
Tylan 8-SiGe Up 29.39/30
Tylan 9-Poly Up 2.89/30
Tylan 10-Nitride Up 24.51/30
Tylan 11-BPSG-LTO up 5.62/30
Tylan 12-FGA Up
Thermco 1 Up
Thermco 2 Up
Thermco Poly Up
Thermco Nitride Down Testing
Epi yellow possible higher leak rate
Burn Box Up
GAAS 22 UP
GAAS 23 up
SiH4 for furnaces A on line 560 psi changeover working well
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