Diffusion Morning Report 05/09/06

Ted Berg tberg at snf.stanford.edu
Tue May 9 06:21:35 PDT 2006


Good Morning All,
    Looking good this morning. LTO is not venting-looking into it. TEOS 
pumpshould be back by Thursday.  Everything else looks OK for now.

Diffusion 	  	  	  	  	 
  	Date: 	5/9/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	Up 	  	  	  	 
Tylan 2 	Up 	  	  	  	 
Tylan 3 	Up 	  	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	Down 	Pump out for repair 	20.43/30 	  	 
Tylan 8-SiGe 	Up 	  	29.51/30 	  	 
Tylan 9-Poly 	Up 	  	4.16/30 	  	 
Tylan 10-Nitride 	Up 	  	25.81/30 	  	 
Tylan 11-BPSG-LTO 	Down 	won't vent 	6.0/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	  	  	  	 
Thermco Nitride 	Down 	Testing 	  	  	 
  	  	  	  	  	 
Epi 	yellow 	possible higher leak rate 	  	  	 
  	  	  	  	  	 
Burn Box 	Up 	  	  	  	 
ZYGO 	up 	  	   	  	 
  	  	  	  	  	 
GAAS 22 	UP 	  	  	  	 
GAAS 23 	up 	  	  	  	 
  	  	  	  	  	 
SiH4 for furnaces 	  	A on line 560 psi 	 changeover working well  	  	 


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